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Injector for a vacuum evaporation source

A technology of vacuum evaporation and ejector, applied in vacuum evaporation coating, sputtering coating, electric solid device and other directions, can solve the problems of uneven spraying, nozzle clogging, etc., and achieve the effect of low cost and increased delay.

Active Publication Date: 2012-07-04
瑞必尔
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Some fragments of the oxidizing species detach from the walls of the injector and land on the top surface of the nozzle, causing a portion of the nozzle to clog
[0009] Clogging of the nozzles leads to uneven spraying of the evaporated substance on the panel to be covered by the evaporated substance

Method used

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  • Injector for a vacuum evaporation source
  • Injector for a vacuum evaporation source
  • Injector for a vacuum evaporation source

Examples

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Embodiment Construction

[0032] Such as figure 1 and figure 2 As shown, the ejector comprises an ejector tube 1 delimiting a first vacuum volume 10 . The injection pipe 1 extends in the longitudinal direction and has a tubular shape with a circular cross section.

[0033] The spray tube 1 comprises an inlet 2 connectable to a vacuum evaporation source, and at least one nozzle 3 for dispersing the evaporated substance into a vacuum deposition chamber (not shown).

[0034] exist Figure 4 In the example shown, the spray pipe 1 comprises several nozzles 3 equidistant and aligned along the longitudinal axis 11 .

[0035] Preferably, the nozzles 3 are embedded within the linear nozzle assembly 12, forming a block in which the nozzles 3 are carried.

[0036] Each nozzle 3 comprises a main channel 6 emerging from the outside of the spray tube 1 and at least one side feed channel 7 connecting the spray tube 1 to the main channel 6 .

[0037] The side feed channel 7 has a side opening 8 which emerges thr...

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Abstract

The present invention concerns an injector for a vacuum evaporation source comprising an injection duct (1) having a longitudinal axis (11) and comprising an inlet port (2) able to be connected to a vacuum evaporation source, and at least one nozzle (3) for diffusing a vaporized material, said nozzle (3) having a lateral face (4), and an upper face (5). According to the invention, the nozzle (3) comprises a main channel (6) emerging outside said injection duct (1) and at least a lateral feeding channel (7) connecting the interior of the injection duct (1) to the main channel (6), said lateral feeding channel (7) having a lateral orifice (8) emerging inside said injection duct (1) through the lateral face (4) of said nozzle (3) for avoiding the clogging of said nozzle (3) by oxidized materials.

Description

technical field [0001] The present invention relates to an ejector for a vacuum evaporation source for evaporating or sublimating a substance within a vacuum deposition chamber. Background technique [0002] Such vacuum deposition chambers are used for example in the production of CIGS (Copper Indium Gallium Selenium) solar cells or OLED (Organic Light Emitting Device) diodes. [0003] This vacuum evaporation source is particularly useful for evaporating selenium for the selenization of glass panels in horizontal top-down or bottom-up in-line systems. [0004] Document WO 2008 / 079209 discloses a known vacuum evaporation source for evaporating organic or inorganic substances for the manufacture of OLED diodes. [0005] Such a vacuum evaporation source includes a body attachable to a vacuum deposition system. The body includes first and second body portions separable from each other. The valve is connected to an injector having a longitudinal shape and several outlet orific...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/243C23C14/26C23C14/14H10K71/00
Inventor J-L·居约克斯F·施特梅伦O·格兰奇
Owner 瑞必尔