Uniformity compensation device applied to large field-of-view montage illumination
A compensation device and a uniformity technology, applied in the field of large-scale integrated circuit manufacturing, can solve the problem that the uniformity of the unit illumination field of view cannot be guaranteed while meeting the requirements, etc., and achieve the effects of good illumination uniformity and high illumination uniformity
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[0030] Such as Figure 4 Shown is the first embodiment of the uniformity compensation device for large field of view splicing illumination provided by the present invention, which uses a quartz rod or a microlens array to homogenize light before entering the light splitting fiber. In this implementation, the ultraviolet light emitted by the mercury lamp light source 1 is condensed by the ellipsoidal reflector 2 in sequence, and the micro lens array 3 and the quartz rod 4 are uniformly modulated. The uniformly modulated ultraviolet light enters the light splitting fiber 5 and is divided into at least two paths. A detector (not shown in the figure) is placed at the light exit of the relay lens 7 to obtain the substrate illumination uniformity signal, which is transmitted to the feedback controller 6, and the position of the mercury lamp is adjusted according to the signal.
[0031] The uniformity compensation device includes a mercury lamp light source 1, an ellipsoidal reflector 2...
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