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A wafer testing method

A wafer testing and wafer technology, applied in the direction of single semiconductor device testing, etc., can solve the problems of inability to adjust the testing strategy on the wafer and spend a lot of testing time, and achieve the effect of saving testing costs, saving testing time, and ensuring accuracy

Active Publication Date: 2015-11-25
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a wafer test method to solve the problem that the prior art test method cannot adjust the test strategy according to the yield rate of the wafer, thus requiring a lot of test time

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Embodiment Construction

[0014] In order to make the above objects, features and advantages of the present invention more obvious and comprehensible, specific implementations of the present invention will be described in detail below.

[0015] Wafer testing method described in the present invention can utilize multiple alternatives to realize, the following is to illustrate by preferred embodiment, certainly the present invention is not limited to this specific embodiment, those of ordinary skill in the art are well known The general replacement of the above is undoubtedly covered within the protection scope of the present invention.

[0016] Please see figure 2 , figure 2 It is a schematic diagram of the first step of the wafer testing method of the present invention. Such as figure 2 As shown, the wafer test method of the present invention has been further improved based on the existing wafer parallel test method, comprising the following steps:

[0017] Step 1, providing a wafer to be tested...

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Abstract

The invention provides a wafer testing method which comprises the steps of: firstly, testing one part of crystal grains on a wafer to be tested in parallel, carrying out statistic analysis on a testing result by applying a script program so that the total yield of the wafer to be tested is judged; if the yield is better, properly reducing the testing requirement, i.e. testing residual crystal grains which are not tested by adopting a testing program for simplifying testing contents according to a product so that testing time is saved; and if the yield is poorer, keeping the original testing requirement even increasing the testing requirement, i.e. testing the residual crystal grains which are not tested by adopting the original testing program or a testing program which is stricter than the original testing program so that the accuracy of testing is ensured, wherein the testing programs are replaced automatically by depending on the script program. By adopting the wafer testing method provided by the invention, the accuracy of the testing result of the wafer can be ensured, and the testing time can be effectively saved, thus the testing cost is saved.

Description

technical field [0001] The invention relates to the technical field of semiconductor testing, in particular to a wafer testing method. Background technique [0002] The manufacturing process of semiconductor components can be roughly divided into wafer manufacturing process, wafer testing, packaging and final testing. Wafer manufacturing process is to make electronic circuit components on silicon wafers. After the manufacturing is completed, the wafers become one by one die, and then the wafer test step conducts an electrical test on the die, eliminates the unqualified die, and cuts the wafer into several dies, and packaging is to package and process the qualified die. The step of wire bonding makes the die become an integrated circuit (Integrated Circuit, IC), and finally it must go through electrical testing to ensure the quality of the integrated circuit. [0003] Please see figure 1 , figure 1 It is a schematic diagram of a wafer parallel testing method in the prior a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/26
Inventor 张宇飞陈宏领周第延
Owner SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP
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