Z-axis servomotor integrated with power-off braking device

A technology of servo motors and braking devices, which is applied in the direction of electromechanical devices, electric components, and control of mechanical energy. It can solve the problems of insufficient response and insufficient braking torque, achieve shortened response time, large braking torque, and prevent accidents. The effect of the accident

Inactive Publication Date: 2012-07-18
HARBIN INST OF TECH
5 Cites 3 Cited by

AI-Extracted Technical Summary

Problems solved by technology

[0003] The present invention is to solve the problem that the braking device of the existing Z-axis servo motor is not fast enough...
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Abstract

A Z-axis servomotor integrated with a power-off braking device belongs to the manufacturing field of semi-conductor chip equipment, and aims to solve the problems that the braking device of a conventional Z-axis servomotor can not respond quickly enough and has an insufficient braking torque. The Z-axis servomotor integrated with the power-off braking device consists of a Z-axis servomotor and the power-off braking device, wherein the power-off braking device comprises a ring-shaped side wall, a fixed wearing piece, a space positioning sleeve, a clutch gear, a clutch wearing piece, a movable wearing piece, an elastic device and a magnet coil, wherein the ring-shaped side wall is fixed on the end cover of the Z-axis servomotor; the magnet coil is sleeved on the outer side of a Z-axis motorshaft of the Z-axis servomotor; the elastic device is arranged between the movable wearing piece and the end cover of the Z-axis servomotor; the clutch wearing piece is sleeved on the outer side of the Z-axis motor shaft; the clutch gear is positioned between the Z-axis motor shaft and the clutch wearing piece and in meshed connection with the clutch wearing piece in a sliding manner; and the fixed wearing piece is sleeved outside the Z-axis motor shaft, and the space positioning sleeve is arranged between the fixed wearing piece and the end surface of the Z-axis servomotor. The Z-axis servomotor integrated with a power-off braking device is used for a Z-axis driving device of a silicon wafer transmission robot.

Application Domain

Technology Topic

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  • Z-axis servomotor integrated with power-off braking device
  • Z-axis servomotor integrated with power-off braking device
  • Z-axis servomotor integrated with power-off braking device

Examples

  • Experimental program(9)

Example Embodiment

[0011] DETAILED DESCRIPTION One. A Z-axis servo motor with integrated power-off braking device is composed of a Z-axis servo motor 12 and a power-off braking device. The power-off braking device is fixed to the output of the Z-axis servo motor 12 On the end face of one side of the shaft, the power-off braking device includes an annular side wall 11, a fixed friction piece 2, a spacing positioning sleeve 3, a cog gear 4, a cog friction piece 5, a movable friction piece 6, an elastic device 7, and Electromagnet coil 8,
[0012] The annular side wall 11 is fixed on the end cover of the Z-axis servo motor 12, and the annular side wall 11 is coaxial with the output shaft of the Z-axis servo motor 12;
[0013] The electromagnet coil 8 is sleeved on the outside of the Z-axis motor shaft 10 of the Z-axis servo motor 12, and is fixedly connected to the end cover of the Z-axis servo motor 12. There is a gap between the inner wall of the electromagnet coil 8 and the Z-axis motor shaft 10 ;
[0014] The movable friction plate 6 is annular, the movable friction plate 6 is sleeved on the outside of the Z-axis motor shaft 10, and there is a gap between the Z-axis motor shaft 10, and is located on the electromagnet coil 8. The movable friction plate 6 and Z An elastic device 7 is arranged between the end covers of the shaft servo motor 12;
[0015] The inlay friction sheet 5 is a circular ring with teeth on the inner side wall, the inlay friction sheet 5 is sleeved on the outside of the Z-axis motor shaft 10, and the inlay friction sheet 5 is fixedly connected with the movable friction sheet 6;
[0016] The cog gear 4 is a circular ring with teeth on the outer side wall. The cog gear 4 is located between the Z-axis motor shaft 10 and the cog friction piece 5, and its inner wall is fixedly connected to the Z-axis motor shaft 10. Sliding and meshing connection with the inlay friction sheet 5;
[0017] The fixed friction plate 2 is annular, the fixed friction plate 2 is sleeved outside the Z-axis motor shaft 10, and there is a gap between the Z-axis motor shaft 10, and the outer side wall of the fixed friction plate 2 and the inner side wall of the annular side wall 11 With clearance fit, a spacing positioning sleeve 3 is provided between the fixed friction plate 2 and the end surface of the Z-axis servo motor 12, and the fixed friction plate 2 is fixedly connected to the end surface of the Z-axis servo motor 12.
[0018] The movable friction plate 6 can move in the axial direction, and can be in close contact with the fixed friction plate 2 under the elastic action of the elastic device 7.

Example Embodiment

[0019] The second embodiment is different from the first embodiment in that this embodiment is a further limitation on the first embodiment, and the elastic device 7 is realized by a spring.

Example Embodiment

[0020] Embodiment 3 The difference between this embodiment and Embodiment 1 is that this embodiment is a further limitation of Embodiment 1. The elastic device 7 is implemented by a spring and is sleeved on the Z-axis motor shaft 10.
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Description & Claims & Application Information

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