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Z-axis servomotor integrated with power-off braking device

A technology of servo motors and braking devices, which is applied in the direction of electromechanical devices, electric components, and control of mechanical energy. It can solve the problems of insufficient response and insufficient braking torque, achieve shortened response time, large braking torque, and prevent accidents. The effect of the accident

Inactive Publication Date: 2012-07-18
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention is to solve the problem that the braking device of the existing Z-axis servo motor is not fast enough to respond and the braking torque is not large enough, and proposes a Z-axis servo motor with integrated power-off braking device

Method used

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  • Z-axis servomotor integrated with power-off braking device
  • Z-axis servomotor integrated with power-off braking device
  • Z-axis servomotor integrated with power-off braking device

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specific Embodiment approach 1

[0011] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS 1. A Z-axis servo motor integrated with a power-off braking device, which is composed of a Z-axis servo motor 12 and a power-off braking device, and the power-off braking device is fixed at the output of the Z-axis servo motor 12 On the end face of one side of the shaft, the power-off braking device includes an annular side wall 11, a fixed friction plate 2, a distance positioning sleeve 3, a tooth cog 4, a tooth insert friction plate 5, a movable friction plate 6, an elastic device 7 and solenoid coil 8,

[0012] The annular side wall 11 is fixed on the end cover of the Z-axis servo motor 12, and the annular side wall 11 is coaxial with the output shaft of the Z-axis servo motor 12;

[0013] The electromagnet coil 8 is set on the outside of the Z-axis motor shaft 10 of the Z-axis servo motor 12, and is fixedly connected with the end cover of the Z-axis servo motor 12, and there is a gap between the inner wall of the ele...

specific Embodiment approach 2

[0019] Embodiment 2. The difference between this embodiment and Embodiment 1 is that this embodiment is a further limitation of Embodiment 1, and the elastic device 7 is realized by a spring.

specific Embodiment approach 3

[0020] Embodiment 3. The difference between this embodiment and Embodiment 1 is that this embodiment is a further limitation of Embodiment 1. The elastic device 7 is realized by a spring, which is sleeved on the Z-axis motor shaft 10 .

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Abstract

A Z-axis servomotor integrated with a power-off braking device belongs to the manufacturing field of semi-conductor chip equipment, and aims to solve the problems that the braking device of a conventional Z-axis servomotor can not respond quickly enough and has an insufficient braking torque. The Z-axis servomotor integrated with the power-off braking device consists of a Z-axis servomotor and the power-off braking device, wherein the power-off braking device comprises a ring-shaped side wall, a fixed wearing piece, a space positioning sleeve, a clutch gear, a clutch wearing piece, a movable wearing piece, an elastic device and a magnet coil, wherein the ring-shaped side wall is fixed on the end cover of the Z-axis servomotor; the magnet coil is sleeved on the outer side of a Z-axis motorshaft of the Z-axis servomotor; the elastic device is arranged between the movable wearing piece and the end cover of the Z-axis servomotor; the clutch wearing piece is sleeved on the outer side of the Z-axis motor shaft; the clutch gear is positioned between the Z-axis motor shaft and the clutch wearing piece and in meshed connection with the clutch wearing piece in a sliding manner; and the fixed wearing piece is sleeved outside the Z-axis motor shaft, and the space positioning sleeve is arranged between the fixed wearing piece and the end surface of the Z-axis servomotor. The Z-axis servomotor integrated with a power-off braking device is used for a Z-axis driving device of a silicon wafer transmission robot.

Description

technical field [0001] The invention belongs to the field of semiconductor chip equipment manufacturing, and relates to a Z-axis driving device of a silicon chip transmission robot, in particular to a Z-axis servo motor integrated with a power-off braking device. Background technique [0002] The Z-axis mechanism of the silicon wafer transfer robot is equipped with a Z-axis servo motor as a power source, and the rotary motion of the servo motor is converted into a linear motion along the Z-axis direction through a screw nut mechanism. Since the Z-axis is defined in the direction perpendicular to the horizontal plane, which is the same as the direction of gravity of the earth, the equipment suddenly encounters a power outage during work and loses the power support of the motor. Under the gravity of the upper mechanism of the Z-axis load, it will move along the Z-axis The screw guide mechanism slides down by itself, which is very likely to cause damage to the equipment and the...

Claims

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Application Information

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IPC IPC(8): H02K7/102
CPCH02K7/1023
Inventor 刘延杰吴明月荣伟彬孙立宁
Owner HARBIN INST OF TECH
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