The invention discloses a
radio frequency micro-electro-
mechanical system (MEMS) switch and a fabrication method thereof. The
radio frequency MEMS switch is characterized by being of a
silicon-
silicon dual-layer structure and comprises a substrate, a
dielectric layer, a driving
electrode, an
isolation layer, a
signal line, a
ground line and a cover cap, wherein the
signal line comprises a
signal line input
electrode, a columnar
anchor point, two fixed beams, a cross beam, a multi-
contact system and a signal line output
electrode, one end of each of the two fixed beams is fixed on the upper surface of the columnar
anchor point, the other ends of the two fixed beams are connected with a fixed end of the cross beam, the multi-
contact system is arranged below a free end of the cross beam, the driving element is arranged below the cross beam, a groove and through holes are formed in a
silicon cap, and the positions of the through holes are in correspondence to the signal line input electrode, the signal line output electrode, the
ground line and the driving electrode. With the
radio frequency MEMS switch disclosed by the invention, the driving
voltage of the switch is effectively reduced, the service lifetime of the contact point is prolonged, the cross beam is protected by the silicon cap so as not to be affected by an environment, and the reliability of the switch is improved.