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Selection method for rotor floating position of magnetic suspension molecular pump and rotor floating control method

A control method and technology of molecular pump, applied in pump control, non-variable-capacity pump, machine/engine, etc., can solve the problem of non-disclosure, etc., and achieve the effect of small magnetic deflection pull and stable floating

Active Publication Date: 2014-04-30
KYKY TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, there is no method disclosed in the prior art to avoid the occurrence of this extreme situation in advance

Method used

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  • Selection method for rotor floating position of magnetic suspension molecular pump and rotor floating control method
  • Selection method for rotor floating position of magnetic suspension molecular pump and rotor floating control method
  • Selection method for rotor floating position of magnetic suspension molecular pump and rotor floating control method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0043] This embodiment provides a method for selecting the floating position of the rotor of a magnetic levitation molecular pump, wherein the magnetic levitation molecular pump is driven by a permanent magnet motor, including the following steps:

[0044] I. Establish a rectangular coordinate system with the center of the inner circle of the radial protective bearing stator as the origin, control the rotor rotation of the magnetic levitation molecular pump, and divide the inner circle of the radial protective bearing stator into six sector intervals on average according to the six states output by the motor Hall sensor ;

[0045] II. Place the rotor of the magnetic levitation molecular pump in the i-th sector (i=1, 2...6) and align the strongest point of the magnetic steel magnetic field strength of the motor rotor with the middle part of the arc section of the sector, and record the motor at this time. The output signal of the Hall sensor;

[0046] III. Through the levitati...

Embodiment 2

[0060] In this embodiment, on the basis of Embodiment 1, in the step B of the buoyancy control method, the following steps are further included:

[0061] a. The magnetic levitation molecular pump rotor is located in the preferred interval, and it is judged whether the output signal state of the Hall sensor of the motor is aligned with the strongest point of the magnetic steel magnetic field strength of the motor rotor and the output of the Hall sensor of the motor when it is aligned with the middle part of the arc section of the preferred interval The signal state is the same;

[0062] b. If the same, then the controller 2 controls the motor to drive the rotor of the magnetic levitation molecular pump to rotate, while observing the output signal of the Hall sensor of the motor. When the output signal state of the Hall sensor of the motor changes once, the control The device 2 controls the motor to stop, and then calls the built-in preferred interval floating control parameters...

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Abstract

The invention discloses a selection method for rotor floating position of a magnetic suspension molecular pump and a rotor floating control method. A rectangular coordinate system is built by using an inner circle center of a radial protection bearing stator as an origin, a rotor is controlled to do autoroatation, the inner circle of the radical protection bearing stator is averagely divided into six fan-shaped regions through six states output by a motor Hall senor, and the floating control parameters and the floating characteristic parameters of the rotor when the rotor is positioned in each region are obtained through suspension tests. One or two regions with the best floating characteristics are selected from the six regions to be used as the optimized floating regions for the rotor, and the floating control parameters, the Y-direction output signal voltage amplitude value range and the X-direction output signal voltage amplitude value range of radial displacement sensors corresponding to the optimized regions are recorded into storage media in the controller. When a magnetic suspension molecular pump starts to work, the magnetic suspension molecular pump controller controls the rotor to be positioned in the optimized regions, then, the stored floating control parameters are invoked for controlling the rotor floating, and the fast and stable floating of the rotor can be realized.

Description

technical field [0001] The invention relates to the technical field of vacuum obtaining equipment, in particular to a method for selecting a floating position of a rotor of a magnetic levitation molecular pump driven by a permanent magnet motor and a method for controlling the floating of the rotor. Background technique [0002] The magnetic suspension molecular pump is a molecular pump that uses magnetic bearings as the rotor support. It uses magnetic bearings to suspend the rotor stably in the air, so that there is no mechanical contact between the rotor and the stator during high-speed operation, and it has no mechanical wear and energy consumption. Low speed, high allowable speed, low noise, long life, no need for lubrication, etc. At present, the magnetic levitation molecular pump is widely used in the fields of obtaining high vacuum and high cleanliness vacuum environment. [0003] The internal structure of the magnetic levitation molecular pump is as follows: figure ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D27/00
Inventor 张剀武涵李奇志张小章邹蒙
Owner KYKY TECH