Displacement measuring device
A technology of measuring devices and detection units, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of limited anti-pollution ability and limited space of detection unit array, and achieve the effect of enhancing anti-pollution ability and increasing the average effect
Inactive Publication Date: 2014-11-19
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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[0005] If the design volume is required to be smaller, or the area occupied by the light spot of the light source is small, the space occupied by the detection unit array is limited, and the average effect will not be particularly obvious, so the anti-pollution ability will be limited in this case. limit
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[0013] combine Figure 1 to Figure 3 Describe the present embodiment, displacement measurement device, this device comprises standard grating 2, for including marking scale according to standard cycle scribe, photoelectric reading head 1, carry out scanning reading in measuring direction, described photoelectric reading head 1 comprises light source 1-1, optical system 1-2, indicating grating 1-3, photoelectric receiving unit 1-4 and signal processing circuit 1-5, said indicating grating 1-3 includes a scale marked by a scanning cycle, the The scanning period is different from the standard period. The photoelectric receiving unit 1-4 includes a detection unit array composed of a plurality of detection units 1-4-2. The light beam emitted by the light source 1-1 becomes collimated light through the optical system 1-2. , the collimated light is converted into an electrical signal by the optical signal modulated by the standard grating 2 and the indicator grating 1-3 in turn, and ...
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The invention discloses a displacement measuring device, which relates to a displacement measuring device. In order to improve the average effect of signals, more detecting periods need to be contained under the circumstance that the amount of detecting units is the same, so as to improve the signal quality to the greatest extent under the constraint that the designed volume is required to be smaller, light spots of a light source occupy smaller area, and the like. The displacement measuring device comprises a standard grating and a photoelectric reading head, wherein the photoelectric reading head comprises the light source, an indicating grating, a photoelectric receiving unit and a signal processing circuit; the photoelectric receiving unit consists of a plurality of detecting units which form a detecting unit array and are divided into three groups; the detecting units with the same phase belong to the same group and are mutually connected; at least one periodic scanning signal is detected by the photoelectric receiving unit; incident light rays are emitted by the light source and are modulated by a scanning mask and the standard grating; and modulated light signals are received by the photoelectric receiving unit. By adopting the displacement measuring device disclosed by the invention, the anti-pollution ability of the signals can be effectively improved.
Description
technical field [0001] The invention relates to a displacement measuring device, in particular to an accurate measuring instrument for measuring displacement. Background technique [0002] The displacement measurement device usually scans the fringes on the moving track, the light emitted by the light source changes with the distance, and the signal is modulated by the reticle stripes on the standard grating and the reticle stripes on the indicator grating, thereby generating position-related photoelectric signal. This displacement measurement device also includes a plurality of detection units, which are used to convert optical signals into electrical signals. These detection units usually have 4 detection units, and each detection unit receives photoelectric signals at 0 degrees and 90 degrees respectively. , 180 degrees, 270 degrees, and make a difference between the electrical signal corresponding to the phase of 0 degrees and the electrical signal corresponding to the ...
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IPC IPC(8): G01B11/02
Inventor 曾琪峰孙强李也凡张立华甘泽龙
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI