Phase modulation grating sensor and method for realizing measurement

A grating sensor and phase modulation technology, applied in measuring devices, instruments, optical devices, etc., can solve problems such as poor real-time performance, no real-time error measurement compensation module, and limited measurement speed, so as to avoid low-frequency drift and amplitude fluctuation Effect

Active Publication Date: 2012-09-19
夏豪杰
View PDF5 Cites 18 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the measurement signal is read, due to low-pass filter noise reduction and the inherent characteristics of photoelectric conversion devices, the amplitude of the measurement signal decreases when the measurement speed is high. In the application process, although digital signal processing can be used to achieve good amplitude stabilization , but these methods are to predict the signal amplitude correctio

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Phase modulation grating sensor and method for realizing measurement
  • Phase modulation grating sensor and method for realizing measurement
  • Phase modulation grating sensor and method for realizing measurement

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0060] A phase-modulated grating sensor such as figure 2 As shown, including the optical path part and the signal processing part, the optical path part is as image 3 As shown, it includes reflective grating ruler 1, shading plate 2, two mirrors 3 and 11, three quarter-wave plates 4, 7 and 10, two polarizing beam splitters 5 and 8, semiconductor laser 6, photoelectric Signal detector 9, piezoelectric ceramic actuator 12 and four-quadrant detector 13, the beam-splitting plane of the first polarization beam splitter 5 is facing the light outlet of the semiconductor laser 6, and the three quarter-wave Plates 4, 7 and 10 are respectively placed in front of the symmetrical plane of the splitting plane and two mutually symmetrical planes adjacent to the splitting plane and the fast axes of the three quarter-wave plates 4, 7 and 10 The direction is 45 degrees, the positions of the two mirrors 3 and 11 are symmetrical, and one of the mirrors 11 is pasted on the piezoelectric cerami...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention discloses a phase modulation grating sensor and a method for realizing measurement. Phase modulation based on PZT is performed to grating measurement signals so as to prevent direct current shift and amplitude value fluctuation from influencing nanometer measurement signals; an error detection module is embedded to real-timely compensate the alignment error of the grating sensor so as to realize displacement and length measurement in nanometer accuracy; and the phase modulation grating sensor comprises an optical path part and a signal processing part. The phase modulation grating sensor and the method have the advantages as follows: installation and adjustment are simplified; redundant reflection beams are reduced; signal quality is improved; interference of the environment to the system is reduced; based on the FPGA signal processing part, the signal processing speed of the system is increased; and by phase modulation, direct current shift and amplitude value fluctuation can be prevented from influencing the measuring signals effectively, so that measurement in nanometer accuracy is realized.

Description

technical field [0001] The invention relates to a phase modulation grating sensor used for nanometer precision measurement of displacement and length and a method for realizing the measurement. Background technique [0002] The industry based on nanotechnology and the semiconductor equipment industry require highly reliable instruments with fast and stable positioning capabilities and sub-nanometer precision. Now, laser interferometers, capacitance measuring instruments and grating sensors can achieve sub-nanometer resolution, but they all have their own problems, such as laser interferometers are sensitive to changes in air temperature, humidity and atmospheric pressure, which affects the repeatability of measurements sex. The measuring range of the capacitance measuring instrument is small, and the adjustment process is difficult during installation. The structure of the grating sensor is compact, and the error averaging effect of the grating measurement, the signal stab...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01B11/02
Inventor 夏豪杰
Owner 夏豪杰
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap