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Minitype piezoelectric electret functional thin film preparation device

A piezoelectric electret and thin film preparation technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc., can solve the mechanical problems of microporous structure membranes The performance and charge storage capacity cannot be effectively controlled, and the microstructure of the thin film is difficult to adjust accurately, etc., to achieve the effects of convenient and flexible replacement, high yield and stable mechanical structure

Inactive Publication Date: 2012-09-19
TONGJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The methods for preparing microporous polymer films by traditional techniques include chemical foaming process, and polymer-inorganic microparticle melt blending extrusion stretching process. The advantage is that it can be produc

Method used

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  • Minitype piezoelectric electret functional thin film preparation device
  • Minitype piezoelectric electret functional thin film preparation device
  • Minitype piezoelectric electret functional thin film preparation device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Using stainless steel as the base material and rotary vane vacuum pumps such as figure 2 The small piezoelectric electret film device shown. Such as figure 2 As shown, the upper part of the metal seat 6 is provided with a cavity 7, one side of the cavity 7 is connected to a vacuum pump 11 through a conduit 10, a heating plate 8 is provided at the lower part of the cavity 7, and a template 9 is provided on the top of the cavity 7, and the template is detachable. It is fixed on the metal seat 6 with rivets; the heating plate 8 and the pipe 10 are both fixed on the metal seat 6 and cannot be removed. Template 9 is structured as image 3 As shown, it is composed of a template punch 12 and a template base 13. The template base 13 has a circular structure, and the template punches 12 are evenly distributed on it; Figure 5 As shown, two sub-film preparation devices are placed up and down, the polymer films located on them are placed opposite each other, and the template punch...

Embodiment 2

[0029] Using stainless steel as the base material and rotary vane vacuum pumps such as figure 2 The small piezoelectric electret film device shown. The thickness of the first template and the second template is 2mm, the diameter of the template is 6cm, and the punching is Square holes, the distance between adjacent punching holes is 0.5mm. The first polymer film 14 is a polypropylene (PP) film with a thickness of 25 um, and the second polymer film 15 is a FEP film with a thickness of 12.5 um. Temperature 1, vacuum degree 1 and vacuum time 1 are respectively 90 o C, 6Pa and 5min; temperature 2, vacuum degree 2 and vacuum time 2 are 180 respectively o C, and 10min. The prepared thin film is electrically polarized by a contact method and a DC voltage of 3000kV, and the aluminum electrode is covered by a vacuum evaporation method. Quasi-static piezoelectric coefficient of the finally obtained PP / FEP composite piezoelectric electret film d 33 It is 300pC / N.

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Abstract

The invention relates to a minitype piezoelectric electret functional thin film preparation device which is formed by the combination of two sub thin film preparation devices, wherein each sub thin film preparation device consists of a metal base, a cavity, a heating plate, a mold board, a guide pipe and a vacuum pump; the upper part of the metal base is provided with the cavity; one side of the cavity is connected with the vacuum pump through the guide pipe; the lower part of the cavity is provided with the heating plate; the top of the cavity is provided with the mold board; a polymer thin film is placed on the mold board; the mold board consists of mold board punching holes and a mold board base body; the mold board base body is of a circular structure, and the mold board punching holes are uniformly distributed on the mold board base body; the sub thin film preparation devices are placed up and down, and the polymer thin films positioned on the sub thin film preparation devices are oppositely placed; and the mold board punching holes positioned on the two sub thin film preparation devices are in one-to-one correspondence. The minitype piezoelectric electret functional thin film preparation device provided by the invention is simple in structure, mold board units can be replaced conveniently and flexibly, and the upper and lower mold boards are positioned accurately. The micro hole structure piezoelectric electret thin film prepared by the invention is stable in mechanical structure, the micro structure heights are in order, the dispersion property of the thin film performance is low, and the rate of finished products is high.

Description

Technical field [0001] The invention relates to a small-scale piezoelectric electret functional film preparation device, which belongs to the technical field of functional materials. Background technique [0002] Piezoelectrets (or ferroelectrets) are a kind of space charge electrets (electrets) materials with microporous structure with electromechanical energy conversion capability (ie piezoelectric effect), which is a kind of artificial intelligence material. The piezoelectric effect of the piezoelectric electret material originates from the long-term storage capacity of the solid-phase substrate and the mechanical properties of the gas-phase microvoids that are easily deformed. Unlike traditional piezoelectric crystals, piezoelectric ceramics, or ferroelectric polymer films (such as PVDF), piezoelectric electret materials have no inherent electric dipoles, nor oriented inherent electric dipoles. The material is a non-polar polymer. figure 1 It is a schematic diagram of the m...

Claims

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Application Information

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IPC IPC(8): H01L41/26H01L41/45
Inventor 张晓青张欣梧娄可行游琼
Owner TONGJI UNIV
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