Two-layer flexible substrate and manufacturing method thereof
A technology of flexible substrates and manufacturing methods, applied in the fields of printed circuit manufacturing, circuit substrate materials, and manufacturing printed circuit precursors, etc., to achieve the effects of less defects, excellent adhesion and corrosion resistance
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[0110] Hereinafter, the present invention will be described in detail using examples, but the present invention is not limited to these examples. The measurement of each property was implemented using the means shown below.
[0111] The measurement method of the pinhole is to position the laminate of the base metal layer and the copper thin film layer obtained by the dry plating method by means of penetration, and then measure its size by using an optical microscope, and measure the pinhole with a diameter of 5 μm to 30 μm. The number of pinholes per square meter.
[0112] The evaluation method for the amount of oligomers is to extract the insulating film after plasma treatment with tetrahydrofuran, and then use the size exclusion chromatography (SEC method) of the extract to measure the proportion of oligomers with a molecular weight of 380 to 13,500. The numerical value before the treatment was set to 100%, and was compared as the "amount of oligomer".
[0113] The measuri...
Embodiment 1
[0122] Hereinafter, a case where surface treatment by plasma treatment is performed on an insulating film will be exemplified.
[0123] A polyimide film with a thickness of 38 μm (manufactured by Toray DuPont Co., registered trademark "Kapton150EN") was applied with a DC voltage of 2000V for 50 seconds between the paired discharge electrodes of the plasma electrode under a nitrogen pressure of 1.6Pa. Plasma treatment is performed on the film-forming surface of the base metal layer. Then, the first layer of the base metal layer is formed on the plasma-treated surface of the polyimide, and the first layer of the base metal layer is made by using a 20% by weight Cr-Ni alloy target (manufactured by Sumitomo Metal Mining Co., Ltd. ), a 20% by weight Cr-Ni alloy base metal layer was formed into a film at a film formation speed of 0.7nm / sec by DC sputtering in an Ar environment.
[0124] The layer thickness was measured with a transmission electron microscope (TEM: manufactured by H...
Embodiment 2
[0127] A polyimide film with a thickness of 38 μm (manufactured by Toray DuPont, registered trademark "Kapton150EN") was applied between the paired discharge electrodes of the plasma electrode for 50 seconds under a nitrogen pressure of 2.4Pa. Plasma treatment is performed on the film-forming surface of the metal layer. Then, the first layer of the base metal layer is formed on the plasma-treated surface of the polyimide, and the first layer of the base metal layer is made by using a 20% by weight Cr-Ni alloy target (manufactured by Sumitomo Metal Mining Co., Ltd. ), a 20% by weight Cr-Ni alloy base metal layer was formed into a film at a film formation speed of 0.7nm / sec by DC sputtering in an Ar environment. The layer thickness was measured with a transmission electron microscope (TEM: manufactured by Hitachi, Ltd.) with respect to a part of the film formed under the same conditions, and it was 0.02 μm. On the 20% by weight Ni-Cr film, a second layer is further formed. The ...
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Abstract
Description
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