Transfer box

Abstract

The invention discloses a transfer box which can be used for transferring by using an automated material handling system (AMHS). An overhead host transfer system configured on the transfer box is used for transporting photo masks mechanically; the risk of photo mask damage caused by manual transfer is reduced greatly, and the labor waste is reduced, and furthermore the time required by a manufacturing process is reduced.

Description

technical field [0001] The present invention relates to a transport box, in particular to a transport box loaded with a plurality of photomask boxes by using the framework of an automatic transport and delivery system. Background technique [0002] The rapid development of modern semiconductor technology, in which optical lithography (Optical Lithography) plays an important role, as long as it is about the definition of graphics (pattern), all need to rely on optical lithography. In the application of optical lithography technology to semiconductors, the designed circuit is made into a light-transmitting photo mask with a specific shape. Using the principle of exposure, the light source is projected onto the silicon wafer through the mask to expose and display a specific pattern. Since any dust particles (such as particles, dust or organic matter) attached to the mask will cause the quality of projection imaging to deteriorate, the mask used to generate graphics must be kep...

AI Technical Summary

Problems solved by technology

Usually, the handling of photomask boxes is mainly carried by manpower. For example, multiple photomask boxes are placed on a cart, and the cart will transport the photomask boxes to the next stage of the preparation process. However, in the current preparation process, the photomask Its volume tends to become larger and larger, and its weight is relatively heavier. In the process of manual handling, it is inevitable that the risk of falling may occur, resulting in a serious loss in cost

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