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Detergent composition used for flat panel display device

A flat display, composition technology, applied in the direction of non-surface active detergent composition, detergent composition, organic non-surface active detergent composition, etc., can solve the problem of unsatisfactory removal

Inactive Publication Date: 2012-12-05
DONGWOO FINE CHEM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this cleaner, being an acidic solution, was not unsatisfactory in removing extremely small particles (such as organic or inorganic substances) with a size of 1 μm or smaller, which may correspond to the fundamental properties of the early cleaning process

Method used

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  • Detergent composition used for flat panel display device
  • Detergent composition used for flat panel display device
  • Detergent composition used for flat panel display device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1 to 12 and comparative example 1 to 5

[0038] Examples 1 to 12 and Comparative Examples 1 to 5: Preparation of Cleanser Compositions

[0039] The components whose contents are shown in Table 1 below were mixed using a mixer equipped with a stirrer, and stirred at a rate of 500 rpm at room temperature for 1 hour, thereby preparing a detergent composition.

[0040] Table 1

[0041]

[0042]

[0043]

[0044] Note: TMAH: Tetramethylammonium Hydroxide

[0045] TEAH: Tetraethylammonium Hydroxide

[0046] BG: Ethylene glycol monobutyl ether

[0047] MDG: Diethylene glycol monomethyl ether

[0048] BDG: Diethylene glycol monobutyl ether

[0049] MTG: Triethylene glycol monoethyl ether

[0050] TMP: Trimethyl Phosphate TBP: Tributyl Phosphate

[0051] TPP: Tripropyl Phosphate TEP: Triethyl Phosphate

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Abstract

The invention discloses a detergent composition used for flat panel display device. Based on the total weight of the composition, the composition comprises 0.01-10 wt% of quaternary ammonium salt compounds, 0.01-10 wt% of diol ether compounds, 0.01-10 wt% of phosphate ester compounds, 0.01-5 wt% of glycerol compounds, and 0.01-1 wt% of contact angle decreasing agents, the remainder being water.

Description

technical field [0001] The present invention relates to a cleaning composition for flat display devices. Background technique [0002] A flat panel display device is manufactured through processes such as film formation, exposure, etching, etc., similar to a semiconductor device. However, this manufacturing process may cause undesired extremely small particles having a size of 1 μm or less, such as various organic or inorganic substances, to adhere to the surface of the substrate, thereby contaminating the substrate. In the case where the substrate is subjected to a subsequent process in a state where such contaminants are attached thereto, film pinholes or pits, and breakage or bridging of wiring may occur, thus deteriorating the product. manufacturing yield. [0003] Therefore, a cleaning process for removing such contamination is performed between processes, and exhaustive research on cleaning agents is being conducted for this purpose. Korean Unexamined Patent Publica...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C11D7/36C11D7/26C11D7/32C11D7/50
CPCC11D1/62C11D7/26C11D7/261C11D7/266C11D7/36C11D2111/22
Inventor 洪宪杓尹嚆重房淳洪金炳默
Owner DONGWOO FINE CHEM CO LTD