Magnetic negative stiffness mechanism

Abstract

The present invention relates to the field of ultra-precision vibration damping. A compact magnetic mechanism with negative rigidity, comprising a machine frame (1), a negative rigidity adjustment component, a flexible guide component, and a motion component. The magnetic mechanism with negative rigidity utilizes the repulsion action of reversely arranged magnets to form a negative rigidity property, and the negative rigidity can be adjusted by the negative rigidity adjusting component. An ultra-low frequency vibration damper formed by connecting the magnetic mechanism with negative rigidity and a positive rigidity spring (40) in parallel has an extremely low dynamic rigidity, thus greatly reducing the inherent frequency thereof, such that the vibration damper has a good vibration isolation effect for high frequency vibration interference while effectively isolating ultra-low frequency vibration, thus being suitable for a vibration sensitive ultra-precision machining and measurement device.

Description

technical field [0001] The invention belongs to the field of ultra-precision vibration reduction, and in particular relates to a magnetic negative stiffness mechanism. The magnetic negative stiffness mechanism involved in the present invention is compact in structure and has negative stiffness characteristics, and is connected in parallel with positive stiffness springs to form an ultra-precision shock absorber, which can realize ultra-low frequency vibration reduction. The positive and negative stiffness parallel shock absorber not only has a good vibration isolation effect on high-frequency vibration interference, but also can effectively isolate ultra-low-frequency vibration, and is suitable for ultra-precision processing and measuring equipment sensitive to low-frequency vibration. Background technique [0002] At present, in the field of high-end IC chip manufacturing and ultra-precision testing, the requirements for environmental micro-vibration isolation are becoming ...

AI Technical Summary

Problems solved by technology

[0003] The air bearing vibration reduction technology can make the shock absorber have an extremely low natural frequency, but the processing accuracy of the air bearing components is very high, and the installation requirements are also very strict, which increases the cost and restricts the air bearing vibration reduction in super Wide application in precision vibration reduction

Maglev vibration reduction is a new type of vibration reduction technology, which has not yet been applied on a large scale, mainly due to the difficulty of maglev control technology, small bearing capacity, and difficulty in miniaturization

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