Magnetic negative stiffness mechanism

Abstract

The invention provides a magnetic negative stiffness mechanism with a compact structure, and belongs to the field of ultra-precise vibration damping. The magnetic negative stiffness mechanism includes a frame part, a negative stiffness adjusting part, a flexible guiding part and a moving part. The negative stiffness mechanism utilizes the reverse repelling action of the magnet to form the negative stiffness characteristic, and the size of the negative stiffness can be adjusted through the negative stiffness adjusting part. As the ultra-low frequency vibration damper formed by combining the magnetic negative stiffness mechanism and the positive stiffness spring has extremely low dynamic stiffness, the inherent frequency of the ultra-low frequency vibration damper is greatly reduced, as a result, the vibration damper not only has excellent vibration isolation effect towards the high-frequency vibration interference, but also can effectively isolate the ultra-low frequency vibration, and the magnetic negative stiffness mechanism is applicable to the ultra-precise machining and measuring equipment sensitive to the vibration.

Description

technical field [0001] The invention belongs to the field of ultra-precision vibration reduction, and in particular relates to a magnetic negative stiffness mechanism. The magnetic negative stiffness mechanism involved in the present invention is compact in structure and has negative stiffness characteristics, and is connected in parallel with positive stiffness springs to form an ultra-precision shock absorber, which can realize ultra-low frequency vibration reduction. The positive and negative stiffness parallel shock absorber not only has a good vibration isolation effect on high-frequency vibration interference, but also can effectively isolate ultra-low-frequency vibration, and is suitable for ultra-precision processing and measuring equipment sensitive to low-frequency vibration. Background technique [0002] At present, in the field of high-end IC chip manufacturing and ultra-precision testing, the requirements for environmental micro-vibration isolation are becoming ...

AI Technical Summary

Problems solved by technology

[0003] The air bearing vibration reduction technology can make the shock absorber have an extremely low natural frequency, but the processing accuracy of the air bearing components is very high, and the installation requirements are also very strict, which increases the cost and restricts the air bearing vibration reduction in super Wide application in precision vibration reduction

Maglev vibration reduction is a new type of vibration reduction technology, which has not yet been applied on a large scale, mainly due to the difficulty of maglev control technology, small bearing capacity, and difficulty in miniaturization

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