Non-contact automatic detection device for absolute grating ruler overall measuring accuracy
An automatic detection device and a technology for measuring accuracy, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve problems such as errors in detection results, and achieve the effect of ensuring accuracy requirements
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[0009] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.
[0010] Such as figure 1 As shown, the non-contact automatic detection device for the overall measurement accuracy of the absolute grating ruler, the device includes: a workbench 1, a collimator 2, a screw 3, a first mirror 4, a second mirror 5, a slide table 6. The grating ruler and the laser interferometer 8; the collimator 2 is fixed on one side of the workbench 1; the standard ruler 7 in the grating ruler is placed on the workbench 1, parallel to the guide rail on the workbench 1, and the grating ruler reading head Placed in the slide table 6; the lead screw 3 is fixed on the workbench 1 below the collimator 2, the slide table 6 is placed on the guide rail of the workbench 1, and the lead screw 3 controls the movement of the slide table 6 on the guide rail; the first The reflector 4 and the second reflector 5 are fixed on the slide table 6...
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