Production method of high-sensitivity biochemical sensor based on resonance type micro-cantilever structure

Abstract

The invention discloses a production method of a high-sensitivity biochemical sensor based on a resonance type micro-cantilever structure. The biochemical sensor is produced on a silicon substrate by using a micro-nano processing technology and taking a cantilever as a structural unit, namely the cantilever and an affiliated structure thereof are produced on a silicon slice by using a photoetching technology and a dry etching technology; an electrical induction element is produced by using an ion injection technology and an electronic beam evaporation technology, so that the element has a function of self-detecting a detection signal; a package cover slice is produced by a design die by a polymer solidifying, demolding and bonding technology. According to theproduction method, the production precision and the yield of the high-sensitivity biochemical sensor are greatly improved; the production method can be used for producing the sensors on a large scale; the production cost is effectively reduced. Moreover, the production method can be also applied to production of micro-electromechanical system (MEMS) devices with other structures, such as a double-end fixed supporting structure, a interdigital accelerator and other capacitance and resistance type sensors.

Description

technical field [0001] The invention relates to the field of MEMS manufacturing and engineering, in particular to a method for manufacturing a high-sensitivity biochemical sensor based on a resonant micro-cantilever beam structure. Background technique [0002] Since the booming development of MEMS technology in the 1980s [1] , More and more MEMS devices are widely used in people's daily life and national defense construction. In recent years, with the development of micro-probes, micro-flow meters and other devices, a large number of MEMS devices have entered the fields of chemical analysis, biological detection, medical screening and environmental monitoring. For example, in 1998, S.Henry et al. developed a 150 μm long microneedle array using microfabrication technology, and studied its mechanical properties and drug delivery characteristics [2] In 2000, D. Kashanin et al. used microfluidic biochips to guide and separate cells, and studied the interaction between T cells...

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Problems solved by technology

In addition, the packaging technology applied to MEMS biochemical sensors needs to consider many limitations, such as the working environment of the device: fluid shock, mechanical vibration and temperature changes, etc.

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