Disc type molecular pump

Abstract

The invention discloses a disc type molecular pump, which comprises a motive disc, a static disc and a pump body. The disc type molecular pump is characterized in that a radial rectangular or a ladder-shaped air flue is arranged on the motive disc and the static disc with certain thicknesses, so as to allow gas molecules on the discs to communicate; and slant angles between the two radial sides of the air flue and the horizontal planes of the discs can be changed from 0 to 180 degrees respectively. In the two radial sides of the air flue on the motive disc and the static disc, as one side mainly for delivering gas molecules, the inclination direction of the two is opposite, while the other side is subject to associating with the delivery of the gas molecules. An air exhaust unit comprising multi-stage motive discs and static discs drives the gas molecules to move in the fixed direction, so as to drag, deliver and compress the gas molecules, thereby performing air exhaust. The disc type molecular pump has the characteristics of simple structure, convenience in manufacturing and processing, large mechanical strength and high resistance against large flow gas impact, and can be widely applied to the medium and high vacuum fields.

Description

technical field [0001] The invention relates to a molecular pump, in particular to a disc type molecular pump. Background technique [0002] At present, the turbomolecular pump widely used to obtain medium and high vacuum, its pumping unit is composed of a series of moving impellers and stationary impellers arranged alternately. The inclination directions of the blades and the stator blades are opposite to each other. When the moving impeller fixed on the rotor rotates at high speed around the stationary impeller fixed on the pump body, the high-speed rotating moving blade transfers the momentum to the gas molecules, which greatly increases the collision between the gas molecules and the moving blades and the stationary blades Opportunity to make gas molecules move in a directional manner to achieve the purpose of pumping. Since the high-speed rotating blades are only suitable for working in the state of molecular flow of gas, once they are impacted by a large flow of gas,...

AI Technical Summary

Problems solved by technology

Since the high-speed rotating blades are only suitable for working in the state of molecular flow of gas, once they are impacted by a large flow of gas, the blades are prone to damage due to the material and structural shape of the blade, and the damage to the stator blades is also involved.

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