Deoxyribonucleic acid (DNA) sequencing device based on graphene nanopore-microcavity-solid-state nanopore and manufacturing method

Abstract

The invention discloses a deoxyribonucleic acid (DNA) sequencing device based on a graphene nanopore-microcavity-solid-state nanopore and a manufacturing method. The manufacturing method comprises the steps of etching an inverted-pyramid-shaped microcavity in the upper part of a silicon on insulator (SOI) silicon wafer; etching a columnar hole on the lower part of the SOI silicon wafer, wherein the tower top of the inverted-pyramid-shaped microcavity is the solid-state nanopore; etching the graphene on the upper part of the inverted-pyramid-shaped microcavity; etching the graphene nanopore in the center of the graphene, wherein a platinum electrode and a longitudinal weak current measurement device as well as a power supply form a longitudinal weak current measurement loop, and a gold electrode and a transverse weak current measurement device as well as the power supply form a transverse weak current measurement loop; etching an inverted cone cavity in the front side of the SOI silicon wafer; etching a vertical columnar hole at the back of the SOI silicon wafer; corroding an oxidized buried layer on the SOI silicon wafer to form the solid-state nanopore; transferring the prepared graphene to the surface of the SOI silicon wafer; etching the graphene nanopore coaxial to the fixed nanopore in the center of the graphene; and enabling a chip, the power supply and an ampere meter to form a circuit so as to realize the sequencing of the DNA by testing the change of current intensity in the circuit when the DNA penetrates through the nanopore.

Description

technical field

[0001] The invention relates to the technical field of biomolecular detection, in particular to a graphene nanopore-microcavity-solid-state nanopore-based DNA sequencing device and a manufacturing method. Background technique

[0002] DNA sequencing technology is one of the core technologies of modern life science research. Among all the third-generation sequencing technologies targeting low-cost, high-throughput, and direct sequencing, nanopore-based single-molecule sequencing is considered to be the most promising technology for realizing the $1,000 human genetic testing project.

[0003] The pore size of solid-state nanopores can be flexibly controlled artificially, and has ideal biochemical pore size stability and excellent physical and chemical properties. With the help of microscope electron beam technology, focused ion beam technology (FIB) and other technologies, researchers have successfully fabricated various nanometer and subnanometer solid-state ...

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