The invention discloses a deoxyribonucleic acid (
DNA) sequencing device based on a
graphene nanopore-microcavity-
solid-state
nanopore and a manufacturing method. The manufacturing method comprises the steps of
etching an inverted-
pyramid-shaped microcavity in the upper part of a
silicon on insulator (SOI)
silicon wafer;
etching a columnar hole on the lower part of the SOI
silicon wafer, wherein the
tower top of the inverted-
pyramid-shaped microcavity is the
solid-state
nanopore;
etching the
graphene on the upper part of the inverted-
pyramid-shaped microcavity; etching the
graphene nanopore in the center of the graphene, wherein a
platinum electrode and a longitudinal
weak current measurement device as well as a power supply form a longitudinal
weak current measurement loop, and a gold
electrode and a transverse
weak current measurement device as well as the power supply form a transverse weak current measurement loop; etching an inverted cone cavity in the front side of the SOI silicon
wafer; etching a vertical columnar hole at the back of the SOI silicon wafer; corroding an oxidized buried layer on the SOI silicon wafer to form the
solid-state nanopore; transferring the prepared graphene to the surface of the SOI silicon wafer; etching the graphene nanopore coaxial to the fixed nanopore in the center of the graphene; and enabling a
chip, the power supply and an
ampere meter to form a circuit so as to realize the sequencing of the
DNA by testing the change of current intensity in the circuit when the
DNA penetrates through the nanopore.