DNA sequencing device, solid-state nanopore array and preparation method of solid-state nanopore array

Abstract

The invention discloses a DNA sequencing device, a solid-state nanopore array and a preparation method of the solid-state nanopore array. The solid-state nanopore array comprises a plurality of pyramids etched on a silicon wafer, silicon oxide grows below each pyramid, silicon nitride is deposited below the silicon oxide, and a first metal electrode is- evaporated below the silicon nitride; secondmetal electrodes are evaporated on the two sides of each pyramid, an inverted pyramid-shaped micro-cavity is formed between the second metal electrodes on the two sides of the adjacent pyramids, a solid-state nanopore is formed in the tower top of each inverted pyramid-shaped micro-cavity, and each solid-state nanopore forms a solid-state nanopore array; the first metal electrode, a variable resistor, a current measuring device, a power supply and the second metal electrodes form a plurality of longitudinal weak current measuring loops; and by adjusting the variable resistor, the current measuring device measures the longitudinal weak current of the longitudinal weak current measuring loops to sequence a DNA sequence passing through the solid-state nanopore array. According to the embodiment of the invention, the DNA sequencing precision and sequencing efficiency can be improved.

Description

technical field [0001] The invention relates to the field of gene detection, in particular to a DNA sequencing device, a solid-state nanopore array and a preparation method thereof. Background technique [0002] Since their introduction more than two decades ago, nanopore sensors have evolved into powerful tools for single-molecule studies. Moreover, due to its low cost, reliability, and rapid detection, nanopore sensors have become the most popular DNA (DeoxyriboNucleic Acid, deoxyribonucleic acid) sequencing method, which is expected to greatly increase the speed of gene sequencing and reduce the cost of gene sequencing. [0003] The single-hole solid-state nanopore DNA sequencing device can only test one DNA sequence at a time, and it is prone to congestion after multiple uses, thereby reducing the test efficiency. Therefore, the potential and application of porous solid-state nanopore array sensors have attracted more and more attention. [0004] However, traditional s...

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Problems solved by technology

[0005] First of all, the traditional method of manufacturing solid-state nanopore arrays is usually directly fabricated on silicon materials, and the nanopore channel length of silicon materials is too long, reaching more than 5nm. When multiple bases pass through in sequence, the sequencing current changes too long.

[0006] Secondly, due to the method of using external electrodes, the traditional method of manufacturing solid-state nanopore array DNA sequencing electrodes is rel

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