62 results about "Nanohole array" patented technology

The application relates to a local polarization enhanced nonlinear ionization nanolithography system and method, and belongs to the technical field of femtosecond laser processing. The nanolithography method has the capability of large-area processing, can process a large-area nanohole array on a material through a 'flying dotting' mode, can control the distance between adjacent points in the nanohole array by controlling the speed of a high-precision displacement table and the repetition frequency of femtosecond laser pulses, can control the size of the nanohole by controlling the pulse energy, can control the characteristic line width of a nanowire by controlling the pulse energy and the speed of the high-precision displacement table, and can realize the patterning processing of the nanowire by designing a pattern and introducing the high-precision displacement table.

The invention relates to the technical field of biosensors, and particularly discloses a preparation method of a multi-channel solid nanopore array. The method comprises the following steps: respectively constructing a group of parallel and independent micro-channels on the front and back surfaces of a chip prepared with a suspended dielectric film window array, enabling the micro-channels on the two surfaces to be orthogonally arranged in space, integrating an independent electrode in each micro-channel, and injecting electrolyte; the electrodes of the micro-channel on one side and the electrodes of the micro-channel on the other side are selectively connected through an external control circuit, namely controllable electric fields can be established on the two sides of the thin film window at the unique intersection point corresponding to the electrodes, so that addressing and selective dielectric breakdown of the window are achieved, all the windows on the whole chip are automatically and sequentially addressed, traversed and processed, and the yield of the chip is improved. And forming a nanopore array. By means of the method, a large number of nanopore arrays can be controllably manufactured on a single chip at a time, and nanopore array machining with high throughput, low cost and high consistency is achieved.

A molecular sensing device and molecular sensing method that are based on quantum plexcitonic states on strongly coupled nanophotonic systems are disclosed. The molecular sensing device includes a metasurface, a layer of a semiconducting and / or dielectric material disposed onto a layer of electrically conducting material, a metal nanohole array disposed onto the metasurface, a biological recognition element disposed onto a surface of the metal nanohole array, and where the surface of the metal nanohole array is configured to receive a bioanalyte and a plurality of quantum emitters. The molecular sensing device can be a mixture of quantum emitters, comprising gold, having more than one aspect ratio. The molecular sensing device may include a spectroscopic instrument, including a portable detector. The one or more biological recognition elements are configured to recognize a communicable disease in response to the presence of a specific biological recognition element.

The invention relates to the technical field of surface plasma photonics and micro-nano optical sensing, in particular to a porous super-structure plasma sensor and a preparation method and application thereof.The porous super-structure plasma sensor comprises a substrate, and a first metal layer, a first silicon dioxide layer, a second metal layer and a second silicon dioxide layer are sequentially arranged on the substrate; a plurality of nanopore arrays are arranged on the porous superstructure plasma sensor; and the nanopore array penetrates through the first silicon dioxide layer, the second metal layer and the second silicon dioxide layer. Through the synergistic effect of a metal-medium-metal-medium (such as gold / silicon dioxide / gold / silicon dioxide) multi-layer structure and the periodic nanopore array, strong surface plasmon resonance is excited in a visible light-near infrared band, perfect combination of high absorptivity, high sensitivity and high FOM value is realized, and the sensor can be used for gas concentration change detection, and can be applied to detection of gas concentration changes. The problem that an existing plasmon sensor cannot meet the working requirement of the visible light-near infrared band is solved.

Chemical functionalization of solid-state nanopores and nanopore arrays and applications thereof. Nanopores are extremely sensitive single-molecule sensors. Recently, electron beams have been used to fabricate synthetic nanopores in thin solid-state membranes with sub-nanometer resolution. A new class of chemically modified nanopore sensors are provided with two approaches for monolayer coating of nanopores by: (1) self-assembly from solution, in which nanopores −10 nm diameter can be reproducibly coated, and (2) self-assembly under voltage-driven electrolyte flow, in which 5 nm nanopores may be coated. Applications of chemically modified nanopore are provided including: the detection of biopolymers such as DNA and RNA; immobilizing enzymes or other proteins for detection or for generating chemical gradients; and localized pH sensing.

The application discloses a pretreatment cleaning agent processing control system and method, relates to the technical field of processing control, and injects a light-controlled origami probe solution into a nano-pore array of a piezoelectric ceramic chip, uses an AFM probe to apply an axial force to activate an origami structure, records a curve of force change with AFM probe displacement in real time, extracts folding displacement of a folding state area and complete unfolding displacement of a complete unfolding area, integrates and calculates the curve to obtain processing free energy, compares the processing free energy with a free energy range of high-quality cleaning agent finished products in a preset database, and if the processing free energy falls within the range, it is determined that current process parameters are in a reasonable interval, the parameters are maintained, and an efficiency label is marked as 1, and if the processing free energy exceeds the range, it is determined that the process is abnormal, an efficiency label is marked as 0, and dynamic adjustment is triggered. The control method not only improves the precision and efficiency of cleaning agent processing, but also reduces the rate of defective products and production loss, and provides key technical support for large-scale and stable production of high-quality cleaning agents.

The invention discloses a preparation method and application of a silicon nanopore array, and relates to the field of nanopore array manufacturing. The method comprises the following steps: taking an AAO film as a nano template, and transferring the AAO film to the surface of a silicon substrate; depositing a silver nanoparticle array on the AAO thin film to form large-area ordered silver nanoparticle arrangement; and removing the AAO thin film to obtain a silver nanoparticle array on the silicon substrate, immersing the silicon substrate containing silver nanoparticles into an etching solution for reaction, and forming the silicon nanopore array by taking the silver nanoparticles as a metal catalyst. Compared with the prior art, the method has the advantages that the geometrical shape of the nanopore can be accurately controlled, and the method has the characteristics of low cost, high adaptability and repeatability and is suitable for large-scale production to meet diversified requirements in different fields.

The invention relates to a funnel diode realized based on a nanopore modified dielectric polymer molecule monolayer, and relates to the technical field of semiconductor devices. The preparation method of the funnel diode comprises the following steps: forming a three-layer PVP dielectric film through bi-crosslinking treatment, and constructing a nanopore array on the surface of the three-layer PVP dielectric film by using a soft nanoimprint technology to form a polymer nano dielectric layer; sequentially depositing an organic semiconductor layer and a top electrode to complete a diode main body structure; and finally, integrating a molecular memory monolayer formed by gold nanoclusters or copper stearate. The device is compact in structure, the unidirectional convergence of current carriers is realized by utilizing a funnel effect generated by the nanopores, and the device has the characteristics of high-voltage rectification ratio and ultralow working voltage under the coordination of a single molecular layer, and has nonvolatile storage and synaptic plasticity.

The invention discloses a reversible dynamic aperture solid nanopore array based on a temperature-sensitive phase change layer and a preparation method and application of the reversible dynamic aperture solid nanopore array, and belongs to the technical field of single molecule detection and nanostructure regulation, the array introduces the temperature-sensitive phase change layer into the inner wall of a solid nanopore, and when the local temperature crosses the phase transition point of the temperature-sensitive phase change layer, reversible volume change is generated; therefore, the effective aperture of the nanopore is continuously adjustable in a sub-nanometer scale range. An independent micro heating unit and an independent temperature sensing unit are integrated below each nanopore in the array, and single-pore-level accurate temperature control adjustment is achieved in a row-column addressing mode. In combination with ionic current monitoring and an external control module, the aperture can be set in real time according to the size requirements of different target molecules, and dynamic aperture regulation and control with a programmable structure, quick response and good repeatability are realized. The array structure provided by the invention is suitable for single molecule level detection of objects such as multiple types of small molecule pollutants, tumor-related biomarkers, biomacromolecules and the like, and has the advantages of high sensitivity, high flux and wide applicability.

The utility model provides a kind of refractive index sensing device based on titanium dioxide nanopore array, it is related to micro-nano photoelectronic technical field, the device includes titanium dioxide substrate, the titanium dioxide substrate surface is equipped with the nanopore array of square periodic arrangement;Gold film layer, the gold film layer covers in nanopore side wall and hole bottom surface;Silver film layer, the silver film layer covers in the upper surface of the titanium dioxide substrate, and the silver film layer with the gold film layer is connected at the orifice edge of nanopore;Silica protective layer, the silica protective layer covers in the exposed surface of the gold film layer, silver film layer, forms the package protection of metal layer.The utility model improves sensitivity and quality factor, and with low-cost material and local coating reduces cost and simplifies structure, also rely on protective layer to enhance stability, realize high performance and economy compatibility.

The application belongs to the technical field of molecular detection, and discloses a medicinal material identification system and method; the method comprises the following steps: emitting a topological protection acoustic wave to concentrate DNA of medicinal materials, marking the DNA with a CdTe quantum dot-nucleic acid probe, scraping the sample to extract DNA and performing PCR amplification, designing a logic gate staple chain to prepare a light-controlled origami probe, and injecting a PZT chip nano-pore array to be light-activated, and then, through AFM analysis of free energy, the medicinal materials are identified; the application constructs a complete technical chain from molecular recognition to reliable storage, and comprehensively solves multiple technical bottlenecks of traditional methods in medicinal material identification.

A fiber optic biosensor and detection system includes a transmission fiber and a metal sensing membrane with a nanopore array. The metal sensing membrane is configured to receive incident light from the transmission fiber and reflect the light back into the transmission fiber for detection. This fiber optic biosensor offers advantages such as compactness and portability.

The present invention discloses a method for preparing a nanodiamond array and ultrasensitive detection of miRNA. The nanodiamond array preparation comprises: self-assembling a densely packed monolayer polystyrene (PS) microsphere template on a gold-coated silicon wafer, then thinning the PS microspheres using a reactive ion etching process to obtain a non-densely packed PS microsphere template, then thermally evaporating an aluminum film and ultrasonically removing the PS microspheres to obtain a micropore array; then modifying the surface of the nanodiamond containing NV color centers with a single-stranded DNA probe, and the DNA probe-modified diamond self-assembles into the nanopore array through gold-sulfur bonds. MiRNA detection comprises: first preparing a probe magnetic sphere coupled to the target miRNA and dropping it onto the nanodiamond array, then scanning the target miRNA-coupled magnetic sphere on the surface of the nanodiamond array using a scanning system, a microwave module, and an optical path system, and collecting a light detection magnetic resonance spectrum. The present invention is expected to be applied to the field of early cancer diagnosis.

This invention relates to an antireflection structure, fabrication method, and application of inverted conical nanopores on the surface of SiC thin films, belonging to the field of surface engineering technology for photoelectric detectors. Addressing the problems of short optical path length and high interface reflection loss in existing SiC thin-film ultraviolet photodetectors based on heterogeneous substrates due to limited film thickness, a periodic array of inverted conical nanopores is constructed on the SiC thin film surface. The etching depth is controlled within the film thickness and does not penetrate the entire film, preserving a continuous electrical transmission channel. This structure creates a continuously gradient equivalent refractive index layer on the surface, reducing the surface reflectivity in the 200–400 nm wavelength range. The inverted conical morphology causes large-angle scattering of incident light, increasing the optical path length of ultraviolet light within the confined film and improving absorption. The array is fabricated using patterned masking technology combined with dry etching, suitable for SiC thin-film MSM or PIN detectors, with an average reflectivity of 7.58%, significantly improving the photoelectric conversion efficiency of the device.

The invention discloses a bionic anti-interference-precursor prediction collaborative high-speed vehicle anomaly detection system. The system comprises a composite circuit board, a multi-modal data processing module, a precursor prediction and diagnosis module, a closed-loop feedback optimization module and an emergency collaborative module. The composite circuit board is of a three-layer stacked structure. A bionic lotus root gradient honeycomb and a micro-channel cooling device are arranged on the bottom layer, and temperature self-adaptive control is achieved. The middle layer is integrated with a precursor characteristic acquisition link and an EMI filtering unit, so that high-precision data acquisition is guaranteed; the bionic cicada wing nanopore array and the spectrum analysis unit are arranged on the surface layer, and environmental protection and electromagnetic interference suppression are both considered. The multi-modal data processing module generates vehicle and hardware feature vectors; the precursor prediction module adopts an improved LSTM and outputs graded early warning and abnormal types; the closed-loop feedback module performs bidirectional optimization on hardware parameters and model parameters; and the emergency cooperation module broadcasts abnormal information through the Internet of Vehicles and triggers hierarchical response. According to the invention, the high-speed scene anomaly detection precision and early warning timeliness are improved, and the system stability is enhanced.

This invention discloses a metamaterial-based composite stealth film, its preparation method, and its applications, belonging to the field of multi-camouflage technology. The metamaterial-based composite stealth film disclosed in this invention includes an anodic aluminum oxide template and an amorphous alloy film deposited on its surface. The anodic aluminum oxide template has a nanopore array structure. In this invention, the anodic aluminum oxide template and the amorphous alloy film in the metamaterial-based composite stealth film exhibit a synergistic effect, modulating infrared radiation through the photonic bandgap effect, suppressing laser reflection through surface plasmon resonance, and generating visible light camouflage through structural color, thereby achieving multi-camouflage capabilities in visible light, laser, and infrared light.

A component (8) adapted to engage with a receiver (6) has an array of contact pads (16) to removeably connect with a corresponding array of connectors (18) on the receiver (6). Each contact pad (16) of the array is electrically connected to the electrode (26) of a corresponding recess or well (28) that is part of a sensor, wherein a membrane is formable across each recess. A conductive grid (102) is configured between the contact pads (16) of the array, to inhibit an electrostatic discharge (ESD) conducting across the recesses or wells and / or direct an ESD away from the recesses or wells.

The application relates to an inorganic nanoparticle array with super-narrow surface lattice resonance and a large-area preparation method thereof, which comprises the following steps: a centimeter-level silicon nanopillar stamp is used to mold a polydimethylsiloxane nanopore array template; the nanopore array template is dipped into a polymer organic solution, and then the nanopore array template is placed on a surface-hydroxylated silicon wafer to form close contact; after the solvent is completely volatilized, a polymer nanopillar array is obtained; metal precursors are adsorbed on the polymer surface through electrostatic action, and the metal ions are reduced by oxygen plasma and the polymer is etched, finally, through thermal annealing, the inorganic nanoparticle array with super-narrow surface lattice resonance is obtained. Compared with the prior art, the application provides a low-cost and high-efficiency universal platform for the preparation of the inorganic nanoparticle array, and makes the large-scale preparation of the next generation of nanophotonic and electronic devices possible.

The invention discloses a preparation method of a plasmon nanopore array, which comprises the following steps: immersing a substrate sheet in a positively charged silane coupling agent solution, and drying to obtain a first surface; forming a single-layer polymer microsphere colloid on the first surface through self-assembly, and forming to obtain a second surface; removing the silane coupling agent layer, which is not shielded by the microspheres, on the second surface to obtain a third surface; removing the microspheres on the third surface, and exposing the array region covered with the silane coupling agent layer to obtain a fourth surface; the fourth surface is immersed in a gold particle solution containing a protective agent, gold particles are electrostatically adsorbed in the array area, and a fifth surface is obtained; and performing high-temperature annealing on the fifth surface to obtain the plasmon nanopore array. The method provided by the invention is simple in preparation process and controllable in structure, and has wide application prospects in the aspects of life science, medical diagnosis and the like.

Disclosed are a light emitting diode and a manufacturing method thereof, comprising: a substrate; an epitaxial layer on the substrate, the epitaxial layer comprising a first semiconductor layer, a multi-quantum well layer and a second semiconductor layer stacked in sequence from bottom to top, the first semiconductor layer and the second semiconductor layer having opposite doping types; a barrier layer between the first semiconductor layer and the multi-quantum well layer; a guide layer between the first semiconductor layer and the barrier layer; and a nano-pore array perpendicular to the surface of the first semiconductor layer and located in at least the guide layer and the first semiconductor layer. The light emitting diode and the manufacturing method thereof provided by the present application set the barrier layer and the guide layer between the first semiconductor layer and the multi-quantum well layer, form the nano-pore array penetrating through the guide layer and the first semiconductor layer and perpendicular to the surface of the first semiconductor layer, so as to adjust the light emission of the light emitting diode.

The invention discloses a nanopore array induced hydrogen tungsten bronze proton sponge electrode and a preparation method and application thereof. A two-dimensional layered nanosheet with a nanopore array is adopted, and the nanopore array induced hydrogen tungsten bronze proton sponge electrode material catalyst is obtained. The nanopore array induced hydrogen tungsten bronze proton sponge electrode material electrocatalyst can provide insertion, storage and removal of active hydrogen due to a layered structure and multiple oxygen vacancies, reinforces combination with NO to generate ammonia, has a relatively high electrochemical active area, can meet most important parameters required by practical application, and has a wide application prospect. As an electrocatalyst, the catalyst has good catalytic performance when being used for flue gas nitrogen oxide electroreduction, high Faraday efficiency can be achieved, and nitrogen oxide can be stably catalyzed to generate ammonia.

The invention discloses a sub-wavelength infrared antenna structure based on a bismuth telluride metasurface nanopore array and a preparation method of the sub-wavelength infrared antenna structure, and relates to the field of metasurface antenna design and infrared band application. According to the structure, bismuth telluride is used as a core material, and a 12 * 12 metasurface nanopore array is prepared through a high-energy electron beam in a transmission electron microscope to serve as a sub-wavelength infrared antenna. The antenna is excited by a dipole source in the center of an array, and full-wave time domain finite difference simulation optimization design is adopted. In the infrared band, the directional coefficient of 15 dBi, the gain of 14.5 dBi and the radiation efficiency of 93% are achieved, and the sub-wavelength size design is achieved due to the high refractive index characteristic of bismuth telluride. The problems that a traditional metal metasurface antenna is large in ohmic loss and large in size in the infrared band are solved, miniaturization, high directivity and adjustable radiation characteristics are achieved, and the polarization adjustable potential is achieved. The method can be widely applied to the fields of infrared communication, sensing, imaging and the like.

The preparation method of the amorphous silicon film comprises the following steps: growing a silicon dioxide film on a silicon substrate; forming a nanopore array layer on the surface of the silicon dioxide film; growing an amorphous silicon thin film on the nanopore array layer; and carrying out annealing treatment on the amorphous silicon thin film. The method is low in manufacturing difficulty, simple in process and low in cost, the growth speed and the growth uniformity are improved, the manufacturing process is more stable and controllable, and the obtained amorphous silicon film is more uniform and compact and better in stability.

A method of calibrating a nanopore array device is described. The nanopore array device comprises an array of nanopore channels, each nanopore channel formed in a membrane separating two ionic solutions. The nanopore channel connects the ionic solutions and the device further comprises a thermal control component for adjusting the temperature of the array of nanopore channels. The method comprises the steps of measuring signals indicative of ion flow through the nanopore channels; analysing the measurement signals and comparing to a reference value; and adjusting the thermal control component to regulate the temperature of the array of nanopore channels based upon the comparison.

This invention discloses a titanium carbide film integrated gold-filled silicon aperture X-ray detector and its fabrication method, comprising: a silicon layer with a bottom contact electrode disposed below it and an insulating dielectric layer with perforated windows disposed above it; a nanopore array disposed on the inner surface of the silicon layer within the region corresponding to the perforated windows and connected to the silicon layer; gold nanopillar structures disposed at the bottom of the nanopores; a top electrode disposed above the insulating dielectric layer, the top electrode not covering the main detection area of ​​the perforated windows, and electrically connected to the detection area corresponding to the perforated windows through the titanium carbide nanofilm covering it; and a titanium carbide nanofilm disposed above the top electrode, the insulating dielectric layer, the gold nanopillar structures, and the nanopore array and in direct contact. This invention utilizes the built-in electric field of the titanium carbide nanofilm / silicon Schottky junction to promote the separation and collection of radiative carriers, achieving low-bias, high-sensitivity, and long-term stable direct X-ray detection.

This invention discloses a highly sensitive optical biochip based on an AAO and ZIF-8 composite structure, and its preparation and detection method, belonging to the field of optical biochip detection technology. In this invention, ZIF-8 is coated onto the surface of nanoporous alumina to obtain a ZIF-8 layer. Then, carboxyl or amino group modification is performed to obtain a functionalized ZIF-8 layer. Subsequently, a crosslinking agent is used to immobilize specific antibodies on the surface of the functionalized ZIF-8 layer, resulting in the optical biosensor. This sensor uses an AAO nanopore array as the structural substrate and integrates a highly active MOF functional layer. It achieves ultrasensitive detection through precise "pore confinement effect" and "molecular recognition technology." The optical biosensor prepared by this invention has advantages such as low cost, high stability, short detection time, and high detection sensitivity and specificity.

The invention provides a preparation method of a silicon-based photonic crystal defected waveguide and phototransistor integrated chip. Sequentially epitaxially growing an N-type Si layer, a P-type Si < x > Ge < 1-x > layer, a P-type Si layer and an N-type polycrystalline Si layer on the SOI substrate; in the transistor part, an N-type polycrystal Si emitter region, a double-base region and an N-type Si collector region are made into strip shapes; respectively manufacturing electrode contact holes on the N-type polycrystal Si layer and the SOI substrate top Si layer, and preparing metal electrodes on the N-type polycrystal Si layer and the SOI substrate top Si layer; and a nano air hole array and a defect waveguide channel are manufactured at the defect waveguide part of the photonic crystal. The photoelectric integration is easy, and the cost is low; the photonic crystal defect waveguide can be conveniently coupled with an optical fiber, and a photonic forbidden band and a light trapping effect are generated through the periodic nanopore array and line defect characteristics so as to control the transmission path of incident light. Incident light is limited in the photonic crystal defect waveguide, and the incident light of 850-940 nm is transmitted in a photonic crystal defect waveguide channel, so that the coupling accuracy and the light absorption efficiency are improved.

The invention provides a refractive index sensing device based on a titanium dioxide nanopore array and a testing method thereof, and relates to the technical field of micro-nano photoelectron, the device comprises a titanium dioxide substrate, and the surface of the titanium dioxide substrate is provided with nanopore arrays which are periodically arranged in a tetragonal manner; the gold film layer covers the side wall of the nanopore and the surface of the bottom of the nanopore; the silver film layer covers the upper surface of the titanium dioxide substrate, and the silver film layer and the gold film layer are connected at the hole opening edge of the nanohole; and the silicon dioxide protection layer covers the exposed surfaces of the gold film layer and the silver film layer to form wrapping protection on the metal layer. According to the invention, the sensitivity and the quality factor are improved, the cost is reduced and the structure is simplified through a low-cost material and local coating, the stability is enhanced through the protective layer, and both high performance and economical efficiency are realized.

The utility model relates to a kind of nanometer injection molding backboard, comprising: metal substrate, its surface is equipped with nano hole array;Plastic side wall, it is covered in the four peripheral edges of the metal substrate, the plastic side wall has the penetration portion extending to the surface of metal substrate, and the penetration portion is filled and anchored in nano hole and forms mechanical interlocking structure.The utility model has the beneficial effects of being capable of improving the connection strength, ensuring the stability of connection, and being capable of reducing cost.

The application discloses a manufacturing method of amorphous silicon film, comprising the following steps: growing a silicon dioxide film on an oriented grain silicon substrate; forming a nano-pore array layer with a preset pore diameter and a preset porosity on the surface of the silicon dioxide film; growing an amorphous silicon film on the nano-pore array layer; and performing annealing treatment on the amorphous silicon film. The technical scheme of the application can manufacture high-quality and uniform amorphous silicon film, and has the advantages of small manufacturing difficulty, simple process, low manufacturing cost and the like, and can meet the demand of large-scale production.