Preparation methods of nanopore-arrayed anodic alumina membrane and nanopore-arrayed anodic alumina microchannel plate

A technology of anodized aluminum and nanohole arrays, which is applied in cold cathode manufacturing, electrode system manufacturing, discharge tube/lamp manufacturing, etc., can solve the problems of increasing the area of ​​the microchannel plate and the difficulty of reducing the channel aperture, and achieve high Spatial resolution, the effect of high spatial resolution

Inactive Publication Date: 2014-12-24
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The invention provides a method for preparing an anodic aluminum oxide membrane of nanohole array and an aluminum oxide microchannel plate, to overcome the technical bottleneck that the channel aperture of the traditional lead-containing silicate glass microchannel plate is difficult to reduce, and to solve t...

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  • Preparation methods of nanopore-arrayed anodic alumina membrane and nanopore-arrayed anodic alumina microchannel plate
  • Preparation methods of nanopore-arrayed anodic alumina membrane and nanopore-arrayed anodic alumina microchannel plate
  • Preparation methods of nanopore-arrayed anodic alumina membrane and nanopore-arrayed anodic alumina microchannel plate

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Embodiment Construction

[0080] Anodized aluminum can withstand high temperatures up to 2000°C in a vacuum environment, so that the photocathode material can be directly deposited on the input end of the microchannel plate under high temperature conditions. Therefore, the selection of photocathode materials is increased, thereby broadening the detection response wavelength range of the microchannel plate, and at the same time, some materials with high secondary electron emission coefficients can be selected to be deposited on the input end, such as diamond. This can greatly increase the electron yield of the first particle collision, and for devices that need to be used under ultra-high vacuum, the increase in the baking temperature is conducive to enhancing the use of vacuum and signal-to-noise ratio, thereby effectively improving the reliability and reliability of optoelectronic devices. service life.

[0081] The processing technology of the microchannel plate based on the nano-hole array anodized ...

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Abstract

The invention relates to preparation methods of a nanopore-arrayed anodic alumina membrane and a nanopore-arrayed anodic alumina microchannel plate. The preparation method of the nanopore-arrayed anodic alumina membrane comprises the following steps of preparation of an alumina membrane and directional pore broadening. The preparation method of the nanopore-arrayed anodic alumina microchannel plate comprises the following steps of preparation of an alumina membrane, directional pore broadening and preparation of a microchannel plate. According to the preparation methods of the nanopore-arrayed anodic alumina membrane and the nanopore-arrayed anodic alumina microchannel plate, the technical bottleneck that the channel aperture of the traditional lead-containing silicate glass microchannel plate cannot be easily reduced is overcome; the difficult problems that the area of the microchannel plate is increased if the ultra-small aperture of the microchannel plate is realized and the like are solved; and the excellent properties of the microchannel plate are achieved, i.e., the space resolution and time resolution of the microchannel plate are improved, the gain is increased, the dark count rate is decreased, the area array is enlarged, a higher temperature can be borne and the like.

Description

technical field [0001] The invention belongs to the technical field of microelectronic technology and photoelectric imaging device manufacturing, and specifically relates to the processing technology of anodic aluminum oxide film of nanohole array and aluminum oxide microchannel plate. Background technique [0002] Micro-channel plate (MCP) is an excellent electron multiplier device, its gain can reach 10 3 -10 6 , the response time is less than 1ns, the spatial resolution is on the order of the channel diameter, the sensitivity reaches a single electron mode, has a high radiation resistance, and can work in a strong magnetic field environment. MCP has important applications in photoelectric conversion, scientific instruments, medical diagnosis, low-light night vision, charged particle detection, nuclear physics, space astronomy detection and other fields. With the development of market demand and the continuous advancement of science and technology, these application fiel...

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Application Information

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IPC IPC(8): C25D11/12C25D11/18H01J9/02
Inventor 朱香平邓国宝
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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