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LTPS-TFT (Low Temperature Poly Silicon-Thin Film Transistor) array substrate and manufacture method thereof, and display device

An array substrate and manufacturing method technology, applied in the field of liquid crystal display, can solve the problems of high manufacturing cost of the array substrate, increased patterning, complex preparation process of LTPS-TFT semiconductor layer, etc., to simplify the production process, shorten the manufacturing time, and reduce the production cost Effect

Active Publication Date: 2015-01-28
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the preparation process of the LTPS-TFT semiconductor layer is complicated, and the number of patterning (Mask) processes needs to be increased, which makes the manufacturing cost of the array substrate too high

Method used

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  • LTPS-TFT (Low Temperature Poly Silicon-Thin Film Transistor) array substrate and manufacture method thereof, and display device
  • LTPS-TFT (Low Temperature Poly Silicon-Thin Film Transistor) array substrate and manufacture method thereof, and display device
  • LTPS-TFT (Low Temperature Poly Silicon-Thin Film Transistor) array substrate and manufacture method thereof, and display device

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Embodiment Construction

[0038] In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

[0039] The embodiment of the present invention aims at the problem that the preparation process of the LTPS-TFT semiconductor layer in the prior art is complicated, and the number of patterning processes needs to be increased, so that the manufacturing cost of the array substrate is too high, and provides an LTPS-TFT array substrate and a manufacturing method thereof, The display device can simplify the manufacturing process of the LTPS-TFT array substrate and reduce the manufacturing cost of the LTPS-TFT array substrate.

[0040] An embodiment of the present invention provides a method for manufacturing an LTPS-TFT array substrate, comprising: simultaneously forming a pixel electrode and a semiconductor layer of the array substrate by ...

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Abstract

The invention discloses an LTPS-TFT array substrate and a manufacture method thereof, and a display device, belonging to the field of liquid display. According to the manufacture method of the LTPS-TFT array substrate, one time construction process is adopted, meanwhile a pixel electrode and a semiconductor layer of the array substrate are formed, and the semiconductor layer is made of polycrystalline silicon and Mask doping is reduced. According to the technical scheme, the manufacture process of the LTPS-TFT array substrate can be simplified, and the manufacture cost of the LTPS-TFT array substrate is lowered.

Description

technical field [0001] The invention relates to the field of liquid crystal display, in particular to an LTPS-TFT array substrate, a manufacturing method thereof, and a display device. Background technique [0002] TFT LCD (Thin Film Transistor Liquid Crystal Display) can be divided into polysilicon (Poly-Si) TFT and amorphous silicon (a-Si) TFT. The difference between the two lies in the characteristics of the transistor. The molecular structure of polysilicon is arranged neatly and directional in a grain (Grain), so the mobility of electrons is many times faster than that of disordered amorphous silicon; the so-called TFT-LCD refers to non-crystalline silicon. Crystalline silicon, the current technology is mature, is the mainstream product of LCD. The polysilicon products mainly include high temperature polysilicon (HTPS) and low temperature polysilicon (LTPS) two products. [0003] Low Temperature Poly-silicon (LTPS) thin film transistor liquid crystal display uses exci...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/77G02F1/1362G02F1/1368
Inventor 张方振
Owner BOE TECH GRP CO LTD