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Detector device

A detector and equipment technology, applied in instruments, semiconductor devices, optical components, etc., can solve the problems of cooling output limit, unused cooling output, etc.

Active Publication Date: 2013-03-06
LEICA MICROSYSTEMS CMS GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this photodetector has the disadvantage that the actual cooling output is limited to a small magnitude, i.e. no condensate occurs
These detector devices have the disadvantage that most of the cooling output is unused and lost

Method used

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Examples

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Embodiment Construction

[0053] figure 1 A detector device 1 is shown, which is equipped to receive light 2 and generate usable electrical signals at an electrical output 3. The detector device 1 includes a housing 4 in which the detector 5 is arranged.

[0054] The detector 5 comprises a light sensor 6, namely a photocathode 8 arranged on a substrate 7, the photocathode 8 being operated in a transmission arrangement. This means that the photocathode 8 receives the light 2 to be detected on its side facing the entrance optics 9 of the housing 4 and emits photoelectrons on the side facing away from the entrance optics 9 of the housing 4.

[0055] The photocathode 8 and its substrate 7 are at a potential level of -8000V, and the housing 4 is at a potential level of 0V.

[0056] In addition, the detector 5 includes an avalanche diode 10 at a potential level of -400V. The photoelectrons generated by the photocathode 8 are accelerated due to the potential difference existing between the photocathode 8 and the a...

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Abstract

The invention relates to a detector device which is configured to receive light and generate electrical signals. The detector device includes a housing, a detector disposed in the housing and a cooling component disposed in the housing. According to the invention, the cooling component electrically insulates the detector with respect to the housing or is part of an insulator that electrically insulates the detector with respect to the housing.

Description

Technical field [0001] The present invention relates to a detector device equipped to receive light and generate electrical signals. The detector device has a housing and has a detector arranged in the housing and a cooling part arranged in the housing. Background technique [0002] Detector devices of the type described above often have dark currents that change with temperature that cause noise. The dark current can be reduced by cooling. [0003] DE 10 2009 036 066 A1 discloses a photodetector comprising a cooling device, in particular a Peltier element, which is thermally connected to the detector. In order to avoid the appearance of condensate on the surface of the photodetector, the sensor is configured to determine the instantaneous value of the relative humidity and the dew point temperature of the environment. The sensor is connected to a control unit that controls the cooling device based on this value. The photodetector has the advantage that cooling is not completely...

Claims

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Application Information

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IPC IPC(8): H01L31/024H01L31/0203G02B21/36
CPCH01J40/16H01J40/02H01J43/28H01L31/024H01J43/02
Inventor 弗兰克·施赖伯贝恩德·维茨戈夫斯基霍尔格·比尔克
Owner LEICA MICROSYSTEMS CMS GMBH