Method and apparatus for purifying polycrystalline silicon through rotation and blow induced inversion solidification
A technology of reverse solidification and polysilicon, applied in chemical instruments and methods, silicon compounds, inorganic chemistry, etc., can solve the problems of high cost of cutting equipment, affecting purification effect, unfavorable production cost, etc., to reduce energy consumption and process links , The effect of saving production cycle and cost
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Embodiment 1
[0023] Such as figure 1 The equipment used in the method of rotating and blowing induced reverse solidification to purify polysilicon, the outer wall is composed of a vacuum chamber 2, and a vacuum pipeline 13 is installed on the outer wall, and one end of the vacuum pipeline 13 is connected with a vacuum pump group 14 for The vacuum chamber is evacuated, and the water cooling plate 12 is movable and sealed at the bottom of the vacuum chamber 2, and a cooling water pipeline is installed inside to realize the cooling of the water cooling plate. The graphite plate 11 is placed on the top of the water cooling plate, and the graphite plate 11 is provided with a One end of the graphite pillar 10 is nested and connected with the graphite plate 11 through the hole, and the other end is nested and connected with the graphite tray 9. The crucible 7 is placed on the graphite tray 9, and the graphite heating element 6 is set on the periphery of the crucible and fixed in the vacuum chamber...
Embodiment 2
[0029] The equipment described in Example 1 is used to induce reverse solidification to purify polysilicon. First, add the cleaned silicon material of 95% of the crucible volume to the crucible 7, with a purity of 99.5%. Vacuum to 5Pa;
[0030] The second step of smelting and solidification: turn on the power, use the induction coil 5 and the graphite heating element 6 to heat the silicon material in the crucible 7 to 1450 ° C until it is completely melted into a silicon melt, keep it at this temperature for 30 minutes, and pull it vertically downward The water cooling plate 12 makes the silicon melt in the crucible 7 move vertically downward at a constant speed at a speed of 2 mm / min to pull the ingot. The silicon melt is directional solidified from the bottom of the crucible 7 to the top. When the silicon melt is solidified to 80%, Rotate the water-cooled plate 12 to rotate the crucible 7 at a rate of 30 r / min, so that the upper layer of the remaining silicon melt gathers to...
Embodiment 3
[0033] The equipment described in Example 1 is used to induce reverse solidification to purify polysilicon. First, add the cleaned silicon material with a crucible volume of 93% to the crucible 7, with a purity of 99.7%. Vacuum to 2Pa;
[0034]The second step of smelting and solidification: turn on the power, use the induction coil 5 and the graphite heating element 6 to heat the silicon material in the crucible 7 to 1500 ° C until it is completely melted into a silicon melt, and keep it at this temperature for 45 minutes, and pull it vertically downward The water cooling plate 12 makes the silicon melt in the crucible 7 move vertically downward at a constant speed at a speed of 0.8 mm / min to pull the ingot. The silicon melt is directional solidified from the bottom of the crucible 7 to the top. When the silicon melt solidifies to 85% , rotate the water cooling plate 12 to make the crucible 7 rotate at a rate of 40r / min, so that the remaining silicon melt in the upper layer ga...
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