Calibration device of ultra-far ultraviolet source

Abstract

The invention provides a calibration device of an ultra-far ultraviolet source. The calibration device comprises a light source, a converging swing mirror unit, an ultraviolet monochrometer unit, a detector unit and a pressure difference unit, wherein the converging swing mirror unit comprises a converging swing mirror which comprises swing mirrors and a rotation displacement platform, the swing mirrors are two concave reflectors bonded by non-reflecting surfaces, central axes of the reflectors of the swing mirrors are coincide, a 30nm-200nm reflecting film is coated on a reflecting surface A of one reflector, and a 60nm-200nm reflecting film is coated on a reflecting surface B of the other reflector. The calibration device can correct spectral radiance parameters of the light source in 30nm-200nm. The calibration device can correct spectral radiance parameters of the light source in 30nm-200nm. The calibration device is small in size, has sufficient ports, has unique design on ultra ultraviolet and far ultraviolet radiation calibration and removal of high-level spectra, and improves accuracy of the ultra ultraviolet and far ultraviolet radiation calibration.

Description

technical field [0001] The invention relates to an extreme ultraviolet light source calibration device, which belongs to the technical field of optical testing. Background technique [0002] The ultraviolet band can be broadly divided into vacuum ultraviolet band (10nm~200nm) and non-vacuum ultraviolet band (200nm~400nm) according to whether it can propagate in the atmosphere. The ultraviolet band below 200nm will be strongly absorbed in the air, so if you want to perform optical metrology in the vacuum band, you must use a vacuum chamber to create a vacuum ultraviolet band measurement test environment. In the vacuum ultraviolet band, it is subdivided into far ultraviolet (80nm-200nm) and extreme ultraviolet band (10nm-80nm), and the boundaries between the two bands are relatively vague. The extreme ultraviolet and extreme ultraviolet radiation calibration standard device involved in the present invention covers the 30nm-200nm band. [0003] The radiation characteristics o...

AI Technical Summary

Problems solved by technology

[0005] In the joint establishment of EUV and far-UV calibration devices based on synchrotron radiation by the domestic NSRL and Metrology Institute, the main focus is on the calibration of standard devices. The interface method and calibration time are not flexible enough, and the coverage of the band range is not complete. Environmental testing capabilities It is not yet available, and the whole machine cannot be calibrated. It is urgent to establish a set of extreme ultraviolet and extreme ultraviolet calibration systems that can meet the actual application requirements in the national defense system and even in China, so as to fill the domestic gap.

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