End cap for magnetron, method of making the same, and magnetron
A magnetron and end cap technology, applied in the field of magnetron, can solve the problems of lowering long-term reliability, shortening life, disadvantages, etc., and achieve the effect of high yield, prolonging life, and high-efficiency manufacturing
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[0107] Then, embodiments of the present invention will be specifically described below with reference to the drawings and the following specific examples.
[0108] (Examples 1 to 5)
[0109] High-purity Mo powder having an average grain size of 3 μm and a purity of 99.9% or more was prepared. As a result of investigating the amount of impurity elements of this high-purity Mo powder, the amount of impurity elements (non-volatile components) was 0.08% by mass or less. As for the amount of each impurity element, the Al content is 0.005% by mass or less, the Ca content is 0.003% by mass or less, the Cr content is 0.005% by mass or less, the Cu content is 0.002% by mass or less, and the Fe content is 0.03 mass % or less, Mg content is 0.002 mass % or less, Mn content is 0.002 mass % or less, Ni content is 0.008 mass % or less, Pb content is 0.002 mass % or less, Si content is 0.005% by mass or less, the Sn content is 0.002% by mass or less, and the carbon content is 0.01% by mass...
example 1
[0123] Example 1: A1→B1→C1
example 2
[0124] Example 2: A1→B2→C2
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Abstract
Description
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