Interferometer shear amount on-line detection system
A detection system and shearing technology, applied in the field of optics, can solve the problems of poor real-time performance, affect work efficiency, low precision, etc., and achieve the effect of improving measurement accuracy and measurement stability, improving test accuracy and high measurement accuracy.
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[0026] see figure 1 , The interferometer shear amount online detection system of the present invention includes a light source system, a collimation system, a scanning system, a Fourier system, a signal acquisition and processing unit, a control unit and a display unit.
[0027] The light source system includes a laser 1 and a laser diverging mirror 2, and the laser diverging mirror 2 is installed on the outgoing light path of the laser 1;
[0028] The collimation system 20 comprises a ground glass 3, a collimation system secondary mirror 4, a collimation system primary mirror 5 and a first iris diaphragm 6, the ground glass 3 is installed on the focal plane of the collimation system 20, and the collimation system secondary mirror 4 is installed on On the intermediate optical path between the main mirror 5 of the collimation system and the ground glass 3 , the first iris diaphragm 6 is installed on the exit window of the collimation system 20 .
[0029] The scanning system in...
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