TiO2 sensitive layer structure used for oxygen sensor and preparation method thereof

Abstract

The invention relates to a TiO2 sensitive layer structure used for an oxygen sensor and a preparation method of the TiO2 sensitive layer. By subjecting the TiO2 sensitive layer structure to reticulate processing, crack formation and spread can be inhibited, so that thermal stress caused cracks can be effectively reduced. And the increase of a surface-volume ratio facilitates oxygen adsorption, thus enhancing the TiO2 sensitive layer sensitivity and reducing the response time. The preparation method of the TiO2 sensitive layer provided in the invention is carried out on a silicon substrate equipped with heating wires, and consists of: first preparing an insulating layer on the heating wires, preparing interdigital electrodes on the insulating layer, then preparing a TiO2 film on the interdigital electrodes, and performing reactive ion etching to make the TiO2 film into a reticulate structure.

Description

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AI Technical Summary

Benefits of technology

This new type of material called titanium dioxide (Ti02) can be made into films that are highly effective at detecting small changes on their surfaces due to temperature differences or other factors such as pressure variations. These materials have low cost compared to existing methods for producing them but they still provide high detection accuracy over longer periods of use without losing functionality quickly enough.

Problems solved by technology

This patents discusses how efficient management of oxygen levels during manufacturing processes helps maintain safe environments while minimizing pollution emissions or improving efficiency. It explains that current methods involve measuring oxygen concentrations accurately without interference caused by other factors like fluctuation over time (thermal) pressure changes). Additionally, there may exist concerns about potential damage caused by excessively low oxygen levels resulting from poor regulation of fossil fuels. Therefore, these technical problem addressed in the patented text include developing cost-effective and effective ways to monitor and manage oxygen within industries, particularly those involved in transportation systems where they contribute significantly towards greenhouse gas emissions.

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