System for growth of gallium oxide by means of ultrasound-assisted fog-phase transport chemical vapor deposition
A chemical vapor deposition, ultrasonic-assisted technology, applied in the field of material growth of chemical vapor deposition, to achieve the effect of convenient doping and alloying
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[0021] Example 1: Epitaxial gallium oxide on sapphire
[0022] 1. Substrate cleaning, etching and annealing.
[0023] 2. Select a quartz holder with a suitable thickness, place the substrate horizontally on the quartz holder, put the quartz holder into the airflow constriction device, and then put the airflow constriction device into the growth chamber so that the substrate is located close to the growth chamber. The position of the front end of the cavity.
[0024] 3. Set the growth temperature to 600°C. When the temperature in the growth chamber reaches the set temperature, turn on the ultrasonic atomizer, and the solution added therein is 0.05mol / L gallium acetylacetonate solution. At the same time, open the dilution gas, the gas is oxygen, and the flow rate is 100 sccm. After the growth chamber was kept warm for 5 minutes, the carrier gas was turned on to start growth. The carrier gas was nitrogen, the flow rate was 700 sccm, the peristaltic pump was turned on, and the p...
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