Quartz flange
A method of basket and quartz, applied in the field of silicon wafer processing devices, can solve the problems of sticking silicon wafers together, affecting the corrosion of aluminum layers, etc., and achieves the effects of preventing floating, improving production efficiency, and having exquisite shapes.
Inactive Publication Date: 2013-04-03
YIXING HUANZHOU MICRO ELECTRONICS
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Problems solved by technology
In the anti-corrosion process of semiconductor metals, when aluminum is used as an electrode, it is necessary to use phosphoric acid to corrode the aluminum layer. Phosphoric acid reacts with aluminum to generate hydrogen gas, which will adhere to the surface of the silicon wafer until the hydrogen bubbles are large enough to detach. The hydrogen attached to the surface of the silicon wafer will float the silicon wafer under certain circumstances, which will cause the silicon wafer inserted in the flower basket to stick together, affecting the continued corrosion of the aluminum layer
Method used
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[0018] Below in conjunction with accompanying drawing and specific embodiment, further illustrate the present invention, should be understood that these embodiments are only for illustrating the present invention and are not intended to limit the scope of the present invention, after having read the present invention, those skilled in the art will understand various aspects of the present invention Modifications in equivalent forms all fall within the scope defined by the appended claims of this application.
[0019] Such as figure 1 Shown: a quartz basket, including a basket body 1 made of quartz, the basket body 1 includes a basket horizontal axis 2 and a basket vertical wall 3, and the vertical wall 3 is symmetrically arranged on the horizontal axis 2 of the basket The two ends form a semi-closed basket body 1 with several basket shafts 2; a basket groove 4 is provided on the inner side of the side wall of the basket cross shaft 2, and the silicon basket embedded in the bas...
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The invention discloses a quartz flange. The quartz flange comprises a flange body (1), wherein the flange body (1) comprises flange transverse shafts (2) and flange vertical walls (3); the flange vertical walls (3) are symmetrically arranged at the two ends of each of the flange transverse shaft (2) and form a semi-closed flange main body (1) with a plurality of flange transverse shafts (2); flange slots (4) are formed in the inner sides of the inner walls of the flange transverse shafts (2); silicon wafers (5) of the flange body (1) are embedded in the flange slots (4); fixing rings (6) are arranged on the side surfaces of the flange vertical walls (3) and are symmetrically arranged on the flange vertical walls (3) on the two ends of each of the flange transverse shaft (2); the shaft centers of the fixing rings (6) are arranged on the same central line; and the two fixing rings (6) are connected by a quartz bar (7) passing through the fixing rings (6). The quartz flange can effectively prevent the silicon wafers from floating and pasting with each other, can shorten the corrosion time, improve the definition of aluminum-layer pattern lines, improve the production efficiency and is suitable for popularization and application.
Description
technical field [0001] The invention relates to a silicon chip processing device in the semiconductor process, in particular to a quartz method basket which can prevent the silicon chips from floating and sticking to each other when processing the aluminum layer on the surface of the silicon chip. Background technique [0002] Due to the good contact between aluminum and silicon, aluminum is widely used in electrodes of chips at this stage. In the anti-corrosion process of semiconductor metals, when aluminum is used as an electrode, it is necessary to use phosphoric acid to corrode the aluminum layer. Phosphoric acid reacts with aluminum to generate hydrogen gas, which will adhere to the surface of the silicon wafer until the hydrogen bubbles are large enough to detach. The hydrogen attached to the surface of the silicon wafer will float the silicon wafer under certain circumstances, which will cause the silicon wafers inserted in the flower basket to stick together, affecti...
Claims
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IPC IPC(8): H01L21/67
Inventor 潘建英伍林张海金
Owner YIXING HUANZHOU MICRO ELECTRONICS