Optical waveguide device and method of manufacturing the same

Abstract

An optical waveguide device using a thin substrate having an electro-optical effect and having a thickness of 10 [mu]m or less, in which, even when the thin substrate is adhered to a supporting substrate, breakage of the thin substrate or supporting substrate is suppressed, and performance deterioration such as optical loss due to fine cracks is also suppressed. The optical waveguide device includes a thin substrate, which has an electro-optical effect and a thickness of 10 [mu]m or less, and in which an optical waveguide is formed, and a supporting substrate that is adhered to the thin substrate through an adhesion layer. A structure is formed in a thin-substrate side surface of the supporting substrate, and the supporting substrate is annealed at a high temperature that is equal to or lower than the Curie temperature after forming the concavo-convex structure and before being adhered to the thin substrate.

Description

technical field [0001] The present invention relates to an optical waveguide element and a manufacturing method thereof, in particular to an optical waveguide element and a manufacturing method thereof in which a thin plate having an electro-optic effect and having a thickness of 10 μm or less is bonded to a reinforcing substrate. Background technique [0002] In the field of optical measurement technology or the field of optical communication technology, optical waveguide elements such as optical modulators using a substrate having an electro-optic effect are often used. In addition, in order to achieve broadband frequency response characteristics or reduce the driving voltage, the thickness of the substrate is reduced to about 10 μm, the effective refractive index of the modulation signal, that is, the microwave, is reduced, and the speed of the microwave and the light wave is matched, thereby improving the electric field efficiency. . As disclosed in Patent Document 1, s...

AI Technical Summary

Problems solved by technology

Especially when crystals with cleavage, such as LN, are used to reinforce the substrate, the wafer is easily damaged by normal processing.

[0007] Thus, in an optical waveguide element that uses a thin plate as the main substrate and has a concave-convex structure on the reinforcing substrate, warpage or fine cracks in the reinforcing substrate, breakage during the manufacturing process or operation, optical loss, or other performance degradation, etc. , the reliability as an optical waveguide element will decrease

Images