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Quartz crystal wafer thickness sorting machine and method

A technology of quartz wafers and sorting machines, applied in sorting and other directions, can solve problems such as large errors, achieve the effects of increasing production capacity and wafer pass rate, improving sorting efficiency, and reducing labor costs

Active Publication Date: 2015-04-01
RES INST OF ZHEJIANG UNIV TAIZHOU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing sorting method adopts the method of physical measurement, and the error is relatively large

Method used

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  • Quartz crystal wafer thickness sorting machine and method
  • Quartz crystal wafer thickness sorting machine and method
  • Quartz crystal wafer thickness sorting machine and method

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Embodiment Construction

[0041] like figure 1 As shown, the quartz wafer thickness sorter of the present invention includes a feeding module 1, a retrieving module 2, a thickness measurement module 3, and a sorting module 5; the retrieving module 2 includes a retrieving motor 15, and the output end of the retrieving motor 15 Connect the fixed end of the arm 16, and the motor 15 can drive the arm 16 to rotate around its fixed end; the free end of the arm 16 is provided with an upper electrode 17;

[0042] One side of the retrieving motor 15 is provided with a feeding module 1, and the other side of the retrieving motor 15 is provided with a thickness measurement module 3; one side of the thickness measurement module 3 is provided with a sorting module 5;

[0043] like figure 2 As shown, the feeding module 1 includes a feeding motor 13, and the output end of the feeding motor 13 is connected to a ball screw 12; the ball screw 12 is connected to a slide block arranged in the elongated film box 9 throug...

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Abstract

The invention discloses a quartz crystal wafer thickness sorting machine which comprises a feeding module, a picking module, a thickness measuring module and a sorting module, wherein the picking module comprises a picking motor, the output end of the picking motor is connected with the fixed end of a picking arm, the picking motor is capable of driving the picking arm to rotate around the fixed end of the picking arm, an upper electrode is arranged at the free end of the picking arm, a feeding module is arranged at one side of the picking motor, a thickness measurement module is arranged at the other side of the picking motor, and a sorting module is arranged at one side of the thickness measurement module. According to the invention, quartz crystal wafers can be fully-automatically sorted, feeding, measurement and sorting are controlled by independent motors, the speed of wafer thickness measurement can be greatly increased, the sorting efficiency is increased, and the labor cost is reduced. The invention also discloses a quartz crystal wafer thickness sorting method.

Description

technical field [0001] The invention relates to a semiconductor wafer processing equipment, in particular to a quartz wafer thickness sorter. The invention also relates to a method for sorting the thickness of quartz wafers. Background technique [0002] Thickness sorting of quartz wafers can effectively improve the yield of wafers. The existing sorting method adopts the method of physical measurement, and the error is relatively large. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a quartz wafer thickness sorter, which can realize automatic sorting of quartz wafers. [0004] In order to solve the above technical problems, the technical solution of the quartz wafer thickness sorter of the present invention is: [0005] Comprising a feeding module 1, a retrieving module 2, a thickness measuring module 3, and a sorting module 5; the retrieving module 2 includes a retrieving motor 15, the output end of the retr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B07C5/08B07C5/02B07C5/36
Inventor 王维锐刘木林王均晖张林友
Owner RES INST OF ZHEJIANG UNIV TAIZHOU
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