Laser interference lithography system

A technology of laser interference lithography and lasers, which is applied in the field of laser interference lithography systems, can solve problems such as difficult to realize large-area high-precision grating production, and achieve the effects of good graphic quality, high graphic locking accuracy, and high graphic locking speed

Active Publication Date: 2013-05-08
TSINGHUA UNIV +1
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Problems solved by technology

Suzhou Sudaweige Optoelectronics Technology Co., Ltd. discloses a parallel interference lithography system in the Chinese patent publication number CN101846890. The lithography system uses a grating to split light and a lens to combine

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Embodiment Construction

[0037] The embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0038] Please refer to figure 1 , figure 1 It is a schematic diagram of the first laser interference lithography system of the present invention. Such as figure 1 As shown, the interference lithography system is composed of a laser 1, a mirror, a beam splitter 2, a substrate table 3, and a substrate 4; the laser light emitted by the laser 1 is divided into two interference beams after passing through the mirror and the beam splitter 2. The interfering light beam realizes combined light interference on the substrate 4 carried by the substrate table 3 through the mirror, and the interference pattern realizes pattern recording and transfer through the exposure of the substrate; the laser interference lithography system also includes a pattern locking system, which includes two beams A sampler 5, a homodyne phase meter 6, an electronic signa...

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Abstract

The invention relates to a laser interference lithography system for fabricating a large-area grating. The system comprises a laser, a reflector, a beam splitter, a substrate stage and the like. A laser beam emitted by the laser passes through the reflector and the beam splitter to be split into two interference beams; the interference beams are reflected by the reflector to realize coherence on a substrate supported on the substrate stage; the interference pattern can realize pattern record transfer by exposing the substrate; and the system uses a pattern locking device based on null measurement principle to perform pattern phase locking to prevent pattern drift during exposure. The locking device comprises a null phase meter, an electronic signal processing component, a controller, a driver and a phase modulation executer, wherein the null phase meter is used for measuring pattern drift of the grating; the pattern drift is fed back to the controller through the signal processing component; and the controller controls the phase modulation executer to realize phase locking through the driver. The laser interference lithography system provided by the invention has the advantages of simple structure, high pattern locking accuracy and the like, and is a key system for realizing large-area high-accuracy grating fabrication.

Description

technical field [0001] The invention relates to a laser interference lithography system, in particular to a laser interference lithography system for large-area grating manufacture. Background technique [0002] Laser interference lithography is an important technology for manufacturing micro-nano array devices using periodic pattern exposure of photosensitive substrates generated by two or more laser interferences. Arrays, gratings, microlens arrays and other devices, these microarray devices are widely used in national defense, people's livelihood, scientific research and other fields. [0003] In recent years, with the continuous improvement of the size, grating line density, and precision requirements of key grating devices in major engineering systems such as large astronomical telescopes, inertial confinement fusion laser ignition systems, and lithography systems, grating manufacturing is moving towards meter-scale, Nano-scale precision, sub-10,000-level line density ...

Claims

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Application Information

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IPC IPC(8): G03F7/20G02B26/06
Inventor 朱煜王磊杰张鸣刘召杨开明胡金春尹文生穆海华胡楚雄徐登峰成荣
Owner TSINGHUA UNIV
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