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Ionization gauge

An ionization gauge and ion technology, applied in the field of ionization gauges, can solve the problems of heavy weight, high cost and complex structure of the ionization gauge, and achieve the effects of low cost, light weight and improved sensitivity

Active Publication Date: 2013-05-08
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the above-mentioned ionization gauge electrodes in the prior art are more, the structure is more complicated, the cost is higher, and the weight of the ionization gauge is relatively large, and there are certain limitations in some practical applications.

Method used

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Embodiment Construction

[0019] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0020] see figure 1 , the first embodiment of the present invention provides an ionization gauge 100, the ionization gauge 100 does not need a casing. The ionization gauge 100 includes a cathode device 110, an anode device 120, an ion collection device 130 and a fixing device 140, and the cathode device 110 and the ion collection device 130 are respectively arranged on both sides of the anode device 120 and connected to the anode The devices 120 are arranged at intervals with a certain interval, and the fixing device 140 is used for fixing the cathode device 110 , the anode device 120 and the ion collection device 130 .

[0021] The anode device 120 includes an anode 121 and an anode wire 122 , the anode 121 is electrically connected to the anode wire 122 , and the anode 121 is fixed to the fixing device 140 through the anode wire 12...

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Abstract

The invention provides an ionization gauge used for measuring the vacuum degree of a vacuum system with a conductive outer shell. The ionization gauge comprises a cathode device, an anode device and an ion collection device, wherein the cathode device and the ion collection device are arranged at two sides of the anode device; and the cathode device, the ion collection device and the anode device are arranged at intervals. The cathode device further comprises an electron emitter which extends to the anode device, and the electron emitter and the anode device are arranged at intervals. The ionization gauge is characterized in that the electron emitter comprises at least one carbon nanometer pipeline. The ionization gauge is directly arranged in the conductive outer shell of a to-be-measured vacuum system.

Description

technical field [0001] The invention relates to an ionization gauge. Background technique [0002] With the rapid development of contemporary science and technology, a vacuum environment is required in many high-tech fields, such as: space simulation, superconducting technology, nuclear fusion reaction, ultra-low temperature and giant particle accelerator technology, etc. In the field of ultra-high vacuum, vacuum measurement is an indispensable and important link. Ionization gauge is an important device for measuring gas pressure, that is, vacuum degree. [0003] In order to further provide vacuum gauges for ultra-high vacuum and extremely high vacuum measurement with small size, low power consumption and simple structure, which are suitable for space technology, ultra-low temperature and giant particle accelerators, etc., Chen Pijin and Li Youzhe, Department of Electronic Engineering, Tsinghua University An electrostatic saddle field gauge was developed on the basis of th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J41/02H01J41/06
CPCH01J41/02H01J41/06
Inventor 柳鹏周段亮张春海齐京陈丕瑾范守善
Owner TSINGHUA UNIV
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