Device with levitation and transportation

Abstract

The invention provides a device with levitation and transportation. The device can rapidly respond to float environmental changes accompanied with substrate transfer, and can convey the substrate in a predetermined floating height. The device comprises a floating platform (10) having a surface arranged with a plurality of discharge ports (11) and a plurality of suction ports (12) in a substrate conveying direction; a suction force supplying device (30); a main pipe (13) communicated with the suction force supplying device (30); a branch pipe (15) communicated with the main pipe and each suction port; a pressure difference damper (20) arranged at middle portion of the main pipe, wherein the pressure difference damper has a manifold (21) for communicating inside and outside gas paths of the main pipe and a valve (22) for blocking the paths, the valve open and close external force applied to the valve by pressure difference between inside and outside gas of the main pipe, and acts through responding to pressure changes valve, thereby changing opening degree and maintaining specified pressure difference.

Description

technical field [0001] The present invention relates to a floating conveyance device that blows out gas such as compressed air to convey a substrate in a floating state. Background technique [0002] A substrate coated with a resist solution (called a coated substrate) is used in a flat panel display such as a liquid crystal display or a plasma display. The coated substrate is formed by a coating device that uniformly coats a coating liquid such as a resist liquid or a chemical liquid on the substrate. [0003] Figure 13 A schematic diagram showing a coating device. The coating device 80 includes a transport device 81 for transporting the substrate W and a coating unit 82 for coating the coating liquid on the substrate. The coating section 82 includes a metal ferrule having a slit extending in a direction perpendicular to the conveying direction of the substrate W by the conveying device 81, and discharges the coating liquid from the slit while conveying the substrate W a...

AI Technical Summary

Problems solved by technology

[0006] However, in such Figure 14 In the floating conveyance device 91 shown, there is a problem that even if the power of the suction power supply device 94 that applies suction to each suction port 93 is a fixed value, the suction power varies depending on the position of the substrate W.

As a result, a phenomenon that the substrate W may be attracted to the floating conveyance device 91 or the end of the substrate W collides with the floating conveyance device 91 may occur.

Images