Automated liquid supply mechanism and coater provided with same
A technology of automatic supply and coating device, which is applied to the device for coating liquid on the surface, liquid degassing, coating and other directions, which can solve the problem of mixing air bubbles or foreign matter, reducing productivity and work efficiency, and increasing the amount of liquid crystal used. It can prevent the generation and mixing of particles, eliminate the deterioration of the liquid supply channel, and prevent the inflow of air bubbles into the discharge device.
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[0054] The embodiment relates to a coating device, which is a coating device that applies liquid crystal to a workpiece while relatively moving a discharge device and a table holding a workpiece, and is called a so-called gantry type in which a beam moves on a table. .
[0055] figure 2 A schematic perspective view showing a coating device equipped with an automatic liquid supply mechanism according to an embodiment, image 3 It shows an enlarged view of main parts of the automatic feeding mechanism according to the embodiment. Below, explain figure 2 Sometimes, the side where the tank 4 is installed is called "left", the opposite side (symbol 9 side) is called "right", the side where the discharge device 24 is installed is called "front", and the opposite side is called "front". The side is called "rear". In addition, the left-right direction is referred to as "X direction", and the front-rear direction is referred to as "Y direction".
[0056] like figure 2 As shown...
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