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99results about How to "Eliminate deterioration" patented technology

Film deposition apparatus and film deposition method

The present invention is a film deposition apparatus configured to deposit a film on a substrate that has been loaded into a vacuum container via a transfer opening and placed on a table in the vacuum container, by supplying a process gas to the substrate from a process-gas supply part opposed to the table under a vacuum atmosphere, while heating a table surface of the table, the film deposition apparatus comprising: an elevating mechanism configured to vertically move the table between a process position at which the substrate is subjected to a film deposition process, and a transfer position at which the substrate is transferred to and from an external transfer mechanism that has entered from the transfer opening; a surrounding part configured to surround the table with a gap therebetween, when the table is located at the process position, so that the surrounding part and the table divide an inside of the vacuum container into an upper space, which is located above the table, and a lower space, which is located below the table; a vacuum exhaust conduit in communication with the upper space, through which a process atmosphere in the upper space is discharged to create a vacuum in the upper space; a heating unit configured to heat a gas contact region ranging from the upper space to the vacuum exhaust conduit, to a temperature higher than a temperature allowing adhesion of reactant; and a heat insulation part disposed between the heating unit and a lower part of the vacuum container surrounding the lower space.
Owner:TOKYO ELECTRON LTD

Film deposition apparatus and film deposition method

The present invention is a film deposition apparatus configured to deposit a film on a substrate that has been loaded into a vacuum container via a transfer opening and placed on a table in the vacuum container, by supplying a process gas to the substrate from a process-gas supply part opposed to the table under a vacuum atmosphere, while heating a table surface of the table, the film deposition apparatus comprising: an elevating mechanism configured to vertically move the table between a process position at which the substrate is subjected to a film deposition process, and a transfer position at which the substrate is transferred to and from an external transfer mechanism that has entered from the transfer opening; a surrounding part configured to surround the table with a gap therebetween, when the table is located at the process position, so that the surrounding part and the table divide an inside of the vacuum container into an upper space, which is located above the table, and a lower space, which is located below the table; a vacuum exhaust conduit in communication with the upper space, through which a process atmosphere in the upper space is discharged to create a vacuum in the upper space; a heating unit configured to heat a gas contact region ranging from the upper space to the vacuum exhaust conduit, to a temperature higher than a temperature allowing adhesion of reactant; and a heat insulation part disposed between the heating unit and a lower part of the vacuum container surrounding the lower space.
Owner:TOKYO ELECTRON LTD

Integrated maintenance instrument for storage battery and method for preventing deterioration of storage battery in storage and transportation period

The invention relates to an integrated maintenance instrument for a storage battery and a method for preventing deterioration of the storage battery in a storage and transportation period. The maintenance instrument comprises a central control and computation unit, a data collection / output mode selection unit, a desulfurization / charging mode selection unit, a pulse / charging generation unit and an output unit, wherein the central control and computation unit and the data collection / output mode selection unit are respectively connected with a data collection unit. The central control and computation unit sends out a corresponding command to control the data collection unit or the output unit to work, thereby completing data collection of the storage battery, balanced charging of the storage battery or pulsed desulfurization of the storage battery. By adopting the method, the influence of self-discharge of the battery can be effectively overcome, the deterioration of the battery in the storage and transportation period can be effectively prevented, and the manual intervention is not required in the whole process; through the three-stage combined maintenance way of detection protection, balanced charging and pulsed desulfurization adopted by the integrated maintenance instrument for the storage battery, the deterioration of the battery can be effectively eliminated, the lost battery performances are restored and the battery can be always kept in an optimal state in the storage and transportation period.
Owner:陈永强
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