Wavelength detector and contact probe using the wavelength detector

Abstract

The present invention provides a wavelength detector and a touch probe using the wavelength detector, wherein the touch probe includes a stylus and an optical detector for optically detecting the posture of the stylus. The lighting subject portion is formed on the stylus and has three or more reflective surfaces. The optical detector includes three or more optical fibers, a light source, a condenser lens group, and a wavelength detector. The wavelength detector calculates posture information of the stylus based on changes in the wavelengths of the reflected light beams caused by changes in intervals between the condenser lens group and the three or more reflective surfaces, respectively. The contact probe obtains the coordinates of the contact position with the object to be measured based on the posture information obtained by the optical detector.

Description

technical field [0001] The present invention relates to an optical wavelength detector and a contact probe using the optical wavelength detector. In particular, the present invention relates to contact probes for coordinate measuring machines, such as scanning probes and touch trigger probes. Background technique [0002] Touch probes for coordinate measuring machines come in various forms, such as an optical detection type that triangulates the posture of a stylus (moving body); another optical detection type that detects the moving length of a moving body with a linear scale; An electrostrictive element is provided on the elastically deformable portion of the moving body to detect the amount of strain to detect the type of posture of the moving body. Such a stylus posture detector is provided as a built-in sensor in the housing of the touch probe. For example, let the light beams emitted by three LEDs shine on the three reflective surfaces of the reflector arranged on th...

AI Technical Summary

Problems solved by technology

Although PSD has the advantage of high-speed detection, there is a problem that since PSD detects the center of gravity of the light distribution, it is difficult to separate the posture data of the moving body from electronic noise and vibration noise

Furthermore, PSD is underpowered for the purpose of detecting the pose of the object under test

[0008] In methods using electrostrictive elements, usually made of PZT, electrostrictive elements are often difficult to maintain because they are easily damaged by impact and difficult to replace the contact pins

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