Precision length measuring machine and method and device for eliminating light quantity interference

Abstract

The embodiment of the invention discloses a precise length measuring machine and a light amount interference removing method and a light amount interference removing device thereof. The method comprises the following steps of before measurement, adjusting the reflection input light amount of a current measuring point till that a measured reflection output light amount value is equal to a target reflection output light amount value by the light amount interference removing device to obtain a supplementary correct reflection input light amount value, wherein the target reflection output light amount values of all the measuring points are equal; and / or adjusting the transmission input light amount of the current measuring point till that a measured transmission output light amount value is equal to a target transmission output light amount value to obtain a supplementary correct transmission input light amount value, wherein the target transmission output light amount values of all the measuring points are equal; and saving the obtained supplementary correct reflection input light amount value and / or the obtained supplementary correct transmission input light amount value of the current measuring point in a measuring parameter set by the light amount interference removing device.

Description

technical field [0001] The invention relates to the field of liquid crystal display manufacturing, in particular to a TFT-LCD precision length measuring machine and a method and device for eliminating light interference. Background technique [0002] TTP (Total Pitch, length) measuring machine is an important optical measurement equipment for TFT (ThinFilmTransistorLiquid, Thin Film Transistor) – LCD (LiquidCrystalDisplay, Liquid Crystal Display) process, mainly used to measure the exposure of the exposure machine when making the first layer of pixel patterns on the glass substrate The measurement of the precision length directly determines the exposure alignment of the subsequent image process and the accuracy of the final assembly and lamination. At the same time, the device is also commonly used for line width measurement. TTP length measuring machine is also called precision length measuring machine. [0003] The optical measurement of the TTP length measuring machine ...

AI Technical Summary

Problems solved by technology

But on the one hand, due to the large number of interference areas, there will be position machine differences between different TTP machines, and it is difficult to completely avoid interference after the design of the implemented product; on the other hand, due to the layout design restrictions of some products, As a result, it is difficult to avoid interference during measurement. For example, a 2200mm*2500mm glass substrate can be divided into 18 32-inch small panels and 8 48-inch small panels. Due to the existence of products of different sizes With different layout designs, it is impossible for all layouts to avoid the interference area of ​​the steel frame of the machine. Therefore, R&D designers can only adjust the measurement position within a certain range (such as ±10mm) when designing, which is very difficult. completely out of the way

Moreover, this method will also increase the workload of R&D designers.

[0006] 2) Manual adjustment is performed when setting point recipe measurement parameters (recipe is usually used to represent a collection of various product parameters in the semiconductor field), but this manual adjustment is completely based on the operator's work experience, and the reliability varies from person to person different, and increase the workload of the operator

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