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Tunnel-scanning nano-level precision gauge

A technology of precision measurement and tunnel scanning, applied in mechanical depth measurement, measurement device, mechanical measurement device, etc., can solve the problems of inconvenient use, time-consuming and labor-intensive ultra-precision measurement, and difficulty in reaching the nanometer level.

Inactive Publication Date: 2013-08-14
邹华兵
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  • Abstract
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Problems solved by technology

At present, the main tool used for ultra-precision measurement is the laser interferometer. Although the precision of this measuring instrument is very high, it is difficult to reach the nanometer level, and it is extremely inconvenient to use. Every measurement requires careful adjustment of its related components. , making ultra-precise measurement work time-consuming and laborious

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  • Tunnel-scanning nano-level precision gauge
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  • Tunnel-scanning nano-level precision gauge

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Embodiment Construction

[0009] The structure of the scanning tunnel nanoscale precision measuring instrument of the present invention is as follows: figure 1 As shown, it mainly consists of a precision ruler (1), a depth gauge (2), an inner and outer diameter ruler (3), a caliper (4), an outer diameter pointer (5), an inner warp pointer (6), a depth pointer (7), an outer diameter Card (8), inner diameter card (9), insulator (10), probe (11), ordered atom plate (12), power supply (13), switch (14) and computer (15). Before using the present invention, place the scanning tunnel nanoscale precision measuring instrument of the present invention on an anti-vibration system, and place the switch (14) in an off state.

[0010] When the inner diameter of a certain pipe needs to be measured, move the caliper (4) to the left so that the two inner diameter cards (9) all extend into the pipe, and then move the caliper (4) to the right to make the two inner diameter cards (9) clamp the inner wall of the pipe. At...

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Abstract

The invention relates to a tunnel-scanning nano-level precision gauge, which is mainly formed by a precision scale (1), a depth scale (2), an inner-outer diameter scale (3), a caliber (4), an outer diameter pointer (5), an inner diameter pointer (6), a depth pointer (7), an outer diameter clamp (8), an inner diameter clamp (9), an insulator (10), a probe (11), a sequenced atom plate (12), a power supply (13), a switch (14) and a computer (15). The tunnel-scanning nano-level precision gauge comprises two steps of macroscopic measurement and microscopic measurement and obtains the measuring result by summing the measuring value obtained by the macroscopic measurement and the measuring value obtained by the microscopic measurement. The macroscopic measurement accuracy only reaches the millimeter level. The microscopic measurement needs to use the probe (11) to scan the orderly arranged atoms on the sequenced atom plate (12), the computer (15) records the number of the scanned atoms at the same time and multiplies the number by the diameter of the corresponding atom to obtain the microscopic measuring result with the nano-level precision. The tunnel-scanning nano-level precision gauge is high in precision, convenient to operate, safe and reliable.

Description

technical field [0001] The invention relates to an ultra-precise measuring tool, in particular to a scanning tunnel nanoscale precision measuring instrument, which can be used to measure the length, width, height, depth of a hole, the inner diameter of a tube, the outer diameter of a shaft, etc., and its accuracy can reach nanoscale. Background technique [0002] Ultra-precision machining technology directly affects the development of a country's cutting-edge technology and defense industry. Ultra-precision measurement technology is one of the foundations and prerequisites for ultra-precision machining. At present, the main tool used for ultra-precision measurement is the laser interferometer. Although the precision of this measuring instrument is very high, it is difficult to reach the nanometer level, and it is extremely inconvenient to use. Every measurement requires careful adjustment of its related components. , making ultra-precision measurement work time-consuming a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/10G01B5/08G01B5/18G01B5/02
Inventor 邹华兵丘永亮
Owner 邹华兵
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