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Scanning tunnel ultra-precision angle measuring instrument

A scanning tunnel and angle measurement technology, which is applied to measuring devices, instruments, and optical devices, can solve the problems of time-consuming and labor-intensive ultra-precision measurement, inconvenient use, and difficulty in reaching the nanometer level.

Inactive Publication Date: 2016-03-02
邹华兵
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Problems solved by technology

At present, the main tool used for ultra-precision measurement is the laser interferometer. Although the precision of this measuring instrument is very high, it is difficult to reach the nanometer level, and it is extremely inconvenient to use. Every measurement requires careful inspection of its related parts. Adjustment, making ultra-precise measurement work time-consuming and laborious

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Embodiment Construction

[0007] The structure of the scanning tunnel ultra-precision angle measuring instrument of the present invention is as follows: figure 1 As shown, it mainly consists of a probe (1), an ordered atom plate (2), an insulator (3), a computer (4), a switch (5), a power supply (6), a laser head (7), and a joystick (8) , a light-transmitting mirror (9), and a fixed point (10). Before using the present invention, the scanning tunnel ultra-precision angle measuring instrument of the present invention is placed on an anti-vibration system, and the fixed point (10) is fixed on the apex of the angle to be measured. When using the present invention, turn on the switch (5) earlier, and now the laser head (7) will emit laser lines and pass through the light-transmitting mirror (9) in a straight line, and the light rays will coincide with one side of the angle, and then the computer ( 4) Adjust the numbers on the display to zero. Then rotate the rocker (8) on which the laser head (7) and the...

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Abstract

The invention relates to an ultraprecise measuring tool, in particular to an ultraprecise angle measuring instrument for tunnel scanning. The ultraprecise angle measuring instrument mainly comprises a probe (1), an order atom plate (2), an insulator (3), a computer (4), a switch (5), a power source (6), a laser head (7), a rocker bar (8), a lens (9) and a fixed point (10). Number of scanned atoms on the order atom plate (2) can be recorded by means of working principle of a scanning tunnel microscope in scanning the atoms and by combining with a computer, and multiplies by diameter of the corresponding atoms to obtain arc length of translating of the probe (1). The arc length is divided by the length from the fixed point (10) to the probe (1) to obtain rotation angle of the rocker bar (8), and the angle value is displayed on the computer (4) and is a measuring value of the angle. The ultraprecise angle measuring instrument is high in measuring accuracy, convenient to operate, safe and reliable.

Description

technical field [0001] The invention relates to an ultra-precise measuring tool, in particular to an ultra-precise angle measuring instrument for a scanning tunnel, which can be used to measure the angle of an object and has high precision. Background technique [0002] Ultra-precision machining technology directly affects the development of a country's cutting-edge technology and defense industry. Ultra-precision measurement technology is one of the foundations and prerequisites for ultra-precision machining. At present, the main tool used for ultra-precision measurement is the laser interferometer. Although the precision of the measuring instrument is very high, it is difficult to reach the nanometer level, and it is extremely inconvenient to use. Every measurement requires careful inspection of its related parts. Adjustment makes ultra-precision measurement work time-consuming and laborious. Contents of the invention [0003] The object of the present invention is to ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/26
Inventor 邹华兵丘永亮
Owner 邹华兵
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