Ultraviolet detector with passivated wide bandgap oxide semiconductor thin film layer and preparation method
A technology of oxide semiconductors and ultraviolet detectors, which is applied in the direction of semiconductor devices, final product manufacturing, sustainable manufacturing/processing, etc., and can solve the problems of slow development of ultraviolet detectors
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Embodiment 1
[0042] [1] Using an ultrasonic cleaner, use 100mL of chloroform, 100mL of methanol, and 100mL of deionized water as the cleaning solution, and add 1.5g of emery abrasive to the cleaning solution, and ultrasonicate the quartz substrate for 10 minutes in sequence. The ultrasonic power is 100W. Then blow dry under nitrogen flow.
[0043] [2] At room temperature, drop 9mL of acetic acid, 8mL of acetylacetone, and 8mL of deionized water into the continuously stirring mixture of 7mL of tetrabutyl titanate and 95mL of ethanol in sequence, and continue stirring until a uniform and transparent orange Red sol, aged for 48 hours before use.
[0044] [3] The prepared TiO 2 The sol was spin-coated on the cleaned quartz substrate at a speed of 3000rpm, and the homogenization time was 20s. Each layer of TiO 2 The sol was baked at 120°C for 7 minutes, cooled in the air for 3 minutes, and spin-coated 5 layers in total; the spin-coated TiO 2 The substrate of the sol was placed in a muffle fu...
Embodiment 2
[0048] [1] Using an ultrasonic cleaner, use 100mL of chloroform, 100mL of methanol, and 100mL of deionized water as the cleaning solution, and add 0.5g of emery abrasive to the cleaning solution. Ultrasonic the quartz substrate for 20 minutes in sequence, and the ultrasonic power is 80W. Then blow dry under nitrogen flow.
[0049] [2] At room temperature, drop 9mL of acetic acid, 8mL of acetylacetone, and 8mL of deionized water into the continuously stirring mixture of 7mL of tetrabutyl titanate and 95mL of ethanol in sequence, and continue stirring until a uniform and transparent orange Red sol, aged for 24 hours before use.
[0050] [3] The prepared TiO 2 The sol was spin-coated on the cleaned quartz substrate at a speed of 2500rpm, and the homogenization time was 15s. Each layer of TiO 2 The sol was baked at 150°C for 5 minutes, cooled in the air for 5 minutes, and spin-coated 3 layers in total; the spin-coated TiO 2 The substrate of the sol was placed in a muffle furnac...
Embodiment 3
[0058] [1] Using an ultrasonic cleaner, use 100mL of chloroform, 100mL of methanol, and 100mL of deionized water as the cleaning solution, and add 1.5g of emery abrasive to the cleaning solution, and ultrasonicate the quartz substrate for 10 minutes in sequence. The ultrasonic power is 100W. Then blow dry under nitrogen flow.
[0059] [2] At room temperature, drop 9mL of acetic acid, 8mL of acetylacetone, and 8mL of deionized water into the continuously stirring mixture of 7mL of tetrabutyl titanate and 95mL of ethanol in sequence, and continue stirring until a uniform and transparent orange Red sol, aged for 48 hours before use.
[0060] [3] The prepared TiO 2 The sol was spin-coated on the cleaned quartz substrate at a speed of 3000rpm, and the homogenization time was 20s. Each layer of TiO 2 The sol was baked at 120°C for 7 minutes, cooled in the air for 3 minutes, and spin-coated 5 layers in total; the spin-coated TiO 2 The substrate of the sol was placed in a muffle furn...
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