LiSiPON (lithium silicon phosphorus) lithium-ion battery solid electrolyte film, and preparation method and application thereof

A solid-state electrolyte and lithium-ion battery technology, applied in secondary batteries, ion implantation plating, circuits, etc., can solve the problems that limit the improvement and improvement of all-solid-state thin-film lithium batteries, low electronic conductivity, and backward research on electrolyte thin films. Achieve excellent stability, great social benefits, and low cost

Inactive Publication Date: 2015-04-22
TIANJIN NORMAL UNIVERSITY
View PDF2 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] As the key material of all-solid-state thin-film lithium-ion batteries, the solid-state electrolyte film is between the positive and negative electrodes and is the medium for ion transmission. Therefore, it must have high ionic conductivity, low electronic conductivity, wide electrochemical window and The positive and negative electrodes have good stability. Many electrode film materials for all-solid-state thin-film lithium batteries have been reported at home and abroad, but the research on electrolyte films lags behind that of electrode films.
This has become a heavy fetter that restricts the further improvement and improvement of all-solid-state thin-film lithium batteries and moves from the laboratory to the market

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • LiSiPON (lithium silicon phosphorus) lithium-ion battery solid electrolyte film, and preparation method and application thereof
  • LiSiPON (lithium silicon phosphorus) lithium-ion battery solid electrolyte film, and preparation method and application thereof
  • LiSiPON (lithium silicon phosphorus) lithium-ion battery solid electrolyte film, and preparation method and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] Adjust Ar, N 2 Flow ratio of synthesized LiSiPON electrolyte film:

[0043] (1) Before the experiment, the Si wafers were ultrasonically cleaned with acetone and absolute alcohol for 15 min, dried and put into the coating chamber.

[0044] (2) Put the circular Li 3 PO 4 The target is fixed on the square Si 3 N 4 On the target, put it on the target platform A in the vacuum chamber, and evacuate the chamber so that the background vacuum degree in the chamber is 2.8×10 -4 Pa.

[0045] (3) Use a mass flow meter to control the Ar intake flow rate to keep it at about 20 sccm, turn on the ion gun power supply, sputtering energy 500eV, sputtering beam current 20mA, and accelerating current 5mA. Wash the samples by bombardment for at least 5 min. Power off the ion gun.

[0046] (4) Turn on the sputtering ion source, control the Ar intake flow rate with a mass flow meter to keep it at about 2 sccm, and turn on the N 2 The intake valve controls the flow rate of 2sccm, 1s...

Embodiment 2

[0053] For the purpose of measuring the ionic conductivity of the thin film electrolyte, Au, LiSiPON film and Au were sequentially deposited on a Si(100) substrate to form an Au / LiSiPON / Au "sandwich" structure (such as figure 2 ). The specific implementation steps are as follows:

[0054] (1) Before the experiment, the sputtering target was adjusted to the Au target, and the Si wafer was ultrasonically cleaned with acetone and absolute alcohol for 15 min, dried and put into the coating chamber.

[0055] (2) Vacuum the chamber so that the background vacuum in the chamber is 2.8×10 -4 Pa.

[0056] (3) Use a mass flow meter to control the Ar intake flow rate to keep it at about 20 sccm, turn on the ion gun power supply, sputtering energy 500eV, sputtering beam current 20mA, and accelerating current 5mA. Wash the samples by bombardment for at least 5 min. Power off the ion gun.

[0057] (4) Turn on the sputtering ion source, and use a mass flow meter to control the Ar intak...

Embodiment 3

[0066] Application of LiSiPON as Electrolyte Film in All-Solid Thin Film Lithium Batteries

[0067] All-solid-state thin-film battery LiCoO 2 Preparation of / LiSiPON / Li

[0068] (1) LiCoO was plated on the Si(110) substrate by RF magnetron sputtering before the experiment 2 Thin film electrode, sputtering time is 4h.

[0069] (2) Use ion beam-assisted deposition equipment to plate thin-film electrolytes, and adjust the sputtering target position to Li 3 PO 4 and Si 3 N 4 Composite target (as described in Example 1), vacuumize the chamber so that the background vacuum in the chamber is 2.8×10 -4 Pa.

[0070] (3) Turn on the sputtering ion source, adjust the Ar flow rate to 2 sccm, N 2 The flow rate is 2 sccm, the sputtering energy is 1.1 keV, and the sputtering beam current is 20 mA. The accelerating voltage is 200V, and the accelerating current is 4mA. Sputtering time is 5h.

[0071] (4) The film is in the high vacuum chamber, and the chamber is not opened until th...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
electrical conductivityaaaaaaaaaa
Login to view more

Abstract

The invention discloses a preparation method of a LiSiPON (lithium silicon phosphorus) lithium-ion battery solid electrolyte film. The LiSiPON lithium-ion battery solid electrolyte film is an LiSiPON film with the thickness of 80nm to 150nm which is obtained by utilizing ion beams with the volume ratio of N2 to Ar (nitrogen:argon) of 1: (5-1) to bombard Li3PO4 (lithium phosphate) and Si3N4 (silicon nitride). The invention also discloses an application of the LiSiPON lithium-ion battery solid electrolyte film in preparing a micro-type full-solid lithium battery material. The experiment shows that when the nitrogen content in the film is effectively improved by increasing the ratio of N2 and when the flow ratio of the nitrogen and argon is 1:1, the ion conductivity can reach 6.8*10<-6>S / cm. The LiSiPON lithium-ion battery solid electrolyte film can be combined with a film electrode to form a full-solid film lithium-ion battery. Not only is the method low in cost and simple in process, but also the prepared film is compact and uniform, the controllability of the preparation condition is strong, and convenience in commercialized mass production can be realized.

Description

technical field [0001] The invention belongs to the technical field of all-solid-state thin-film lithium-ion batteries. In particular, it involves the preparation of LiSiPON by the ion beam assisted deposition (IBAD) technique, which utilizes low-energy nitrogen ion bombardment to form LiSiPON 3 PO 4 and Si 3 N 4 Composition of the composite target to obtain electrolyte film with high nitrogen content. Background technique [0002] With the continuous development of electronic devices in the direction of miniaturization and light weight, there is an urgent need for micro-sized chemical power sources to match them. In particular, Micro-Electronic Mechanical Systems (Micro-Electronic Mechanical Systems, MEMS) technology development needs, micro-battery has attracted people's attention. The series of micro batteries that have been researched so far include: micro zinc-nickel batteries, micro all-solid lithium batteries, micro solar cells, micro thermoelectric batteries, mi...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): H01M10/0562C23C14/06C23C14/34
CPCY02E60/10
Inventor 李德军李国珍董磊
Owner TIANJIN NORMAL UNIVERSITY
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap