Six-freedom-degree regulating mechanism of laser discharging cavity

Abstract

The invention discloses a six-freedom-degree regulating mechanism of a laser discharging cavity. The six-freedom-degree regulating mechanism of the laser discharging cavity comprises two regulators, wherein the two regulators are installed at the front end and the rear end in the direction of the optical axis of the bottom face of the laser discharging cavity respectively, and each regulator comprises a universal wheel device and two lifting devices; the mounting plane of the laser discharging cavity is XY plane, the X-axis direction of the XY plane is the direction of the optical axis of the laser discharging cavity, the Y-axis direction of the XY plane is the direction perpendicular to the X-axis, and the Z-axis direction is the direction perpendicular to the mounting plane; the universal wheel devices of the two regulators jointly regulate horizontal movement in the XY plane and rotation on the Z-axis which are carried out by the laser discharging cavity; the lifting devices of the two regulators jointly regulate the height of laser discharging cavity in the Z-axis direction and rotation of the X-axis and the Y-axis of the laser discharging cavity around the XY plane. The six-freedom-degree regulating mechanism of the laser discharging cavity can achieve rough regulation and fine regulation of the laser discharging cavity in terms of six degrees of freedom, and is simple in structure, easy to machine and convenient to mount.

Description

technical field [0001] The invention relates to the technical field of laser installation and calibration, in particular to a six-free adjustment mechanism for a laser discharge cavity, and is especially suitable for adjusting and aligning an optical axis and an optical path system when a heavy laser is disassembled. Background technique [0002] Lasers such as excimer lasers have heavy machine components. When the whole machine is integrated or the laser is replaced, the optical axis of the laser discharge cavity and the optical axis of the entire laser optical system must be kept coincident, which poses a higher requirement for the installation of the laser. Require. Therefore, an adjustment mechanism capable of working under the existing optical path system is essential. [0003] figure 1 and figure 2 shows the setup schematic of the discharge cavity of the excimer laser, figure 1 and figure 2 are top view, and figure 1 Shown is the discharge cavity of a single-ca...

AI Technical Summary

Problems solved by technology

Since the alignment of the optical path of the discharge chamber 3 requires very fine position adjustment, and because the laser itself weighs about 150Kg, it cannot be realized by manpower.

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