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Integrated type water-cooling heat dissipation mechanism of deformable mirror

A water-cooled heat-dissipating, integral technology, applied in the field of deformable mirrors, can solve problems such as damage and failure of the actuating element, expansion of the base, etc., and achieve the effects of increasing storage capacity, improving heat dissipation, and high heat conduction efficiency

Active Publication Date: 2013-09-04
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, the currently used deformable mirror mechanism also has its design limitations. When the laser to be processed irradiates its working surface, the actuating element of the deformable mirror will be irradiated by a small part of the residual laser light and heat up rapidly, so that the base, together with each Fittings swell and even damage the actuating element

Method used

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  • Integrated type water-cooling heat dissipation mechanism of deformable mirror
  • Integrated type water-cooling heat dissipation mechanism of deformable mirror
  • Integrated type water-cooling heat dissipation mechanism of deformable mirror

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Embodiment Construction

[0028] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0029] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientations or positional relationships indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying Describes, but does not indicate or imply that the device or element referred...

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Abstract

The invention discloses an integrated type water-cooling heat dissipation mechanism of a deformable mirror. The integrated type water-cooling heat dissipation mechanism of the deformable mirror comprises a heat sink, a mirror body, an actuating element and two water connectors, wherein a containing groove is formed in the heat sink, the top of the containing groove is open, a water inlet and a water outlet are formed in the heat sink, a plurality of mirror legs are arranged on the heat sink, and each mirror leg is arranged on the heat sink in a penetrating mode in the vertical direction. The mirror body is arranged on the top of the heat sink, and the lower surface of the mirror body is connected with the upper surface of each mirror leg. A plurality of actuating legs are arranged on the actuating element, each actuating leg is connected with the lower surface of one mirror leg, and therefore the amount of deformation of the mirror body is controlled through control over the amount of actuating of each actuating leg. The two water collectors are communicated with the water inlet and the water outlet respectively. According to the integrated type water-cooling heat dissipation mechanism of the deformable mirror, heat of laser penetrating through the mirror body can be adsorbed by cooling liquid in the heat sink, so that the phenomenon that working performance of the actuating element is influenced by radiation of the laser penetrating through the mirror body is avoided. Therefore, the amount of deformation of the mirror body will not be influenced by fluctuation of the temperature, and stability of the deformable mirror is improved.

Description

technical field [0001] The invention relates to the field of deformable mirrors, in particular to an integrated water-cooling heat dissipation mechanism for deformable mirrors. Background technique [0002] Deformable mirrors, also known as deformable mirrors, are mainly used in various adaptive optics systems. As a wavefront correction device to correct wavefront errors, they play an extremely important role in adaptive optics systems. One of the important components, the research and development of the deformable mirror is related to the correction ability and correction accuracy of the whole adaptive optics system. [0003] However, the currently used deformable mirror mechanism also has its design limitations. When the laser to be processed irradiates its working surface, the actuating element of the deformable mirror will be irradiated by a small part of the residual laser light and heat up rapidly, so that the base, together with each The fittings swell and even damag...

Claims

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Application Information

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IPC IPC(8): G02B26/06
Inventor 黄磊巩马理闫平邱运涛柳强张海涛
Owner TSINGHUA UNIV
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