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Vapor deposition device, vapor deposition method, and organic EL display device

A technology of evaporation and evaporation source, applied in lighting devices, vacuum evaporation coating, sputtering coating, etc., can solve the problems of difficult operation, difficulty in achieving high precision, productivity and safety obstacles, etc., and achieve high productivity. Effects of reduced reduction, excellent display quality, and excellent reliability

Inactive Publication Date: 2013-09-04
SHARP KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, it is difficult to perform high-precision patterning, and shifts in deposition positions and color mixing occur, making it difficult to achieve high-definition
[0011] In addition, when the mask is enlarged, the mask and the frame holding the mask become huge and their weight increases, so handling becomes difficult, which may hinder productivity and safety.
In addition, the vapor deposition device and its accompanying devices are similarly enlarged and complicated, so device design becomes difficult and installation costs become high.
[0012] Therefore, in the conventional coating vapor deposition method described in Patent Documents 1 and 2, it is difficult to deal with large substrates, for example, for those exceeding 60 inches in size Large substrates, it is difficult to perform separate coating evaporation at the mass production level

Method used

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  • Vapor deposition device, vapor deposition method, and organic EL display device
  • Vapor deposition device, vapor deposition method, and organic EL display device
  • Vapor deposition device, vapor deposition method, and organic EL display device

Examples

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Embodiment approach 1）

[0159] Figure 5 It is a perspective view showing the basic configuration of the vapor deposition apparatus according to Embodiment 1 of the present invention. Figure 6 yes Figure 5 The shown vapor deposition device is a front sectional view along a plane passing through the vapor deposition source 60 .

[0160] The vapor deposition unit 50 includes a vapor deposition source 60, a vapor deposition mask 70, and a limiting unit 80 disposed therebetween. The substrate 10 moves at a constant speed along the arrow 10 a on the side opposite to the vapor deposition source 60 with respect to the vapor deposition mask 70 . For the convenience of the following description, it is assumed that the horizontal axis parallel to the moving direction 10a of the substrate 10 is the Y axis, the horizontal axis perpendicular to the Y axis is the X axis, and the vertical axis perpendicular to the X axis and the Y axis It is the XYZ orthogonal coordinate system of the Z axis. The Z axis is pa...

Embodiment approach 2）

[0228]In Embodiment 1 described above, the lowermost sheet material to which the vapor deposition material 95 is attached is taken out of the vapor deposition chamber 100, and another clean sheet material is stacked on the uppermost layer sheet material. On the other hand, in Embodiment 2, when the vapor deposition material 95 adheres only to the lower surface of the lowermost sheet material, the sheet material is not taken out from the vapor deposition chamber 100 but is reversed and laminated. on the top plate.

[0229] Hereinafter, Embodiment 2 will be described focusing on differences from Embodiment 1. FIG. In the drawings referred to in the following description, components corresponding to those described in Embodiment 1 are given the same reference numerals, and their repeated descriptions will be omitted.

[0230] Hereinafter, a maintenance method for the limiting unit 80 in the vapor deposition apparatus according to Embodiment 2 will be described.

[0231] Figur...

Embodiment approach 3）

[0245] In Embodiments 1 and 2 described above, the plurality of plate materials constituting the restricting unit 80 are all the same. On the other hand, in Embodiment 3, the arrangement of the through-holes is different for each of the plurality of plate materials constituting the restricting unit 80 .

[0246] Hereinafter, Embodiment 3 will be described focusing on differences from Embodiments 1 and 2. FIG. In the drawings referred to in the following description, components corresponding to those described in Embodiment 1 are given the same reference numerals, and their repeated descriptions are omitted.

[0247] In order to simplify the description, Embodiment 3 will be described using an example in which the limiting unit 80 includes three plates.

[0248] Figure 14 It is a partial plan view of three plates 831 , 832 , and 833 constituting the confinement unit 80 of the vapor deposition apparatus according to the third embodiment. The plates 831 , 832 , and 833 have t...

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Abstract

Vapor deposition particles (91) released from at least one vapor deposition source opening (61) pass through a plurality of restriction openings (82) in a restriction unit (80) and a plurality of mask openings (71) in a vapor deposition mask (70), and adhere to and thereby form a coating on a substrate (10) which moves in a relative manner in a second direction (10a). The restriction unit includes a plurality of stacked plate materials. It is therefore possible to form a vapor-deposited coating having minimal blurring at the edges on a large substrate with good efficiency and at low cost.

Description

technical field [0001] The present invention relates to a vapor deposition device and a vapor deposition method for forming a film of a predetermined pattern on a substrate. Also, the present invention relates to an organic EL display device including an organic EL (Electro Luminescence: electroluminescence) element including a light emitting layer formed by vapor deposition. Background technique [0002] In recent years, flat panel displays have been used in various products and fields, and flat panel displays have been required to be larger in size, higher in image quality, and lower in power consumption. [0003] Under such circumstances, an organic EL display device equipped with an organic EL element using electro luminescence (Electro Luminescence) of an organic material is an all-solid-state flat panel that is capable of low-voltage drive, high-speed response, and self-luminescence. The display has received a high degree of attention. [0004] For example, in an act...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/54C23C14/00C23C14/04H01L51/50H05B33/10
CPCC23C14/042C23C14/243H05B33/10C23C14/564H10K71/166H10K71/00H10K71/233H10K50/11
Inventor 园田通川户伸一井上智桥本智志
Owner SHARP KK
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