Europium-terbium co-doped zirconium phosphate luminescent material as well as preparation method and application thereof
A technology of zirconium phosphate and luminescent materials, applied in luminescent materials, chemical instruments and methods, semiconductor devices, etc.
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[0033] The preparation method of the above-mentioned europium-terbium co-doped zirconium phosphate luminescent material comprises the following steps:
[0034] Step S11, according to MZr 4-x-y P 6 o24 :xEu 3+ , yTb 3+ The stoichiometric ratio of each element is weighed as MO, P 2 o 5 , Eu 2 o 3 and Tb 4 o 7 Powder, where M is Ca, Ba or Sr, 0.02≤x≤0.1, 0.01≤y≤0.04.
[0035] In this step, preferably, x is 0.06 and y is 0.02.
[0036] Step S12, sintering the mixed powder at 900°C-1300°C for 0.5-5 hours to obtain the target product.
[0037] In this step, it is preferable to sinter at 1250° C. for 3 hours.
[0038] One embodiment of the europium-terbium co-doped zirconium phosphate light-emitting thin film, the general chemical formula of the material of the europium-terbium co-doped zirconium phosphate light-emitting thin film is MZr 4-x-y P 6 o 24 :xEu 3+ , yTb 3+ , where MZr 4 P 6 o 24 is the matrix, Eu and Tb elements are active elements, M is Ca, Ba or Sr, ...
Embodiment 1
[0068] Use powder with a purity of 99.99%, mix 1mol of CaO, 3.92mol of ZrO 2 , 3mol of P 2 o 5 , 0.03mol Eu 2 o 3 and 0.005mol of Tb 4 o 7 , after uniform mixing, sintered at 1250°C to form a ceramic target with a diameter of 50mm and a thickness of 2mm, and put the target into a vacuum chamber. Then, the glass substrate with ITO was ultrasonically cleaned with acetone, absolute ethanol and deionized water successively, treated with oxygen plasma, and placed in a vacuum chamber. The distance between the target and the substrate is set to 60mm. Use a mechanical pump and a molecular pump to pump the vacuum of the cavity to 5.0×10 -4 Pa, the working gas flow rate of argon is 25 sccm, the pressure is adjusted to 2.0 Pa, and the substrate temperature is 500°C. The obtained sample was annealed in a 0.01Pa vacuum furnace for 2h at an annealing temperature of 600°C, and the chemical formula was CaZr 3.92 P 6 o 24 :0.06Eu 3+ , 0.02Tb 3+ luminescent thin film, and then vapo...
Embodiment 2
[0073]Use powder with a purity of 99.99%, mix 1mol of CaO, 3.97mol of ZrO 2 , 3mol of P 2 o 5 , 0.01mol Eu 2 o 3 and 0.0025mol of Tb 4 o 7 , after uniform mixing, sintering at 900°C to form a ceramic target with a diameter of 50mm and a thickness of 2mm, and put the target into a vacuum chamber. Then, the glass substrate with ITO was ultrasonically cleaned with acetone, absolute ethanol and deionized water successively, treated with oxygen plasma, and placed in a vacuum chamber. The distance between the target and the substrate was set to 45 mm. Use a mechanical pump and a molecular pump to evacuate the vacuum of the chamber to 1.0×10 -3 Pa, the working gas flow rate of argon is 10 sccm, the pressure is adjusted to 0.2 Pa, and the substrate temperature is 250°C. The obtained samples were annealed in a 0.01 Pa vacuum furnace for 1 h at an annealing temperature of 500 °C. Get the chemical formula CaZr 3.97 P 6 o 24 :0.02Eu 3+ , 0.01Tb 3+ luminescent thin film, and ...
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