Praseodymium-doped molybdate light emitting film and preparation method and application thereof

A light-emitting film, molybdate technology, applied in the direction of light-emitting materials, chemical instruments and methods, semiconductor devices, etc.

Inactive Publication Date: 2014-05-21
OCEANS KING LIGHTING SCI&TECH CO LTD +2
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the praseodymium-doped molybdate light-emitting film that can be applied to thin-film electroluminescent displays has not been reported yet.

Method used

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  • Praseodymium-doped molybdate light emitting film and preparation method and application thereof
  • Praseodymium-doped molybdate light emitting film and preparation method and application thereof
  • Praseodymium-doped molybdate light emitting film and preparation method and application thereof

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preparation example Construction

[0032] The preparation method of the above-mentioned praseodymium-doped molybdate luminescent film comprises the following steps:

[0033] Step S11, loading the substrate into the reaction chamber of the chemical vapor deposition equipment, and setting the vacuum degree of the reaction chamber to 1.0×10 -2 Pa~1.0×10 -3 Pa.

[0034] In this embodiment, the substrate is indium tin oxide glass (ITO). It can be understood that in other embodiments, it can also be fluorine-doped tin oxide glass (FTO), aluminum-doped zinc oxide (AZO) or indium-doped glass. zinc oxide (IZO); the substrate was ultrasonically cleaned with toluene, acetone and ethanol for 5 minutes, then rinsed with distilled water, air-dried with nitrogen, and sent to the reaction chamber.

[0035] Preferably, the vacuum degree of the reaction chamber is 4.0×10 -3 Pa.

[0036] Step S12 , heat-treating the substrate at 600° C. to 800° C. for 10 minutes to 30 minutes.

[0037] Step S13, adjusting the temperature of ...

Embodiment 1

[0071] The substrate is ITO glass, which is ultrasonically cleaned with toluene, acetone and ethanol for 5 minutes, then rinsed with distilled water, air-dried with nitrogen, and sent to the reaction chamber of the equipment. Use a mechanical pump and a molecular pump to evacuate the vacuum of the chamber to 4.0×10 -3 Pa; Then the substrate is heat-treated at 700°C for 20 minutes, and then the temperature is lowered to 500°C. Turn on the rotary motor, adjust the rotating speed of the substrate holder to be 300 rev / min, feed organic source cyclopentadiene magnesium ((C 5 h 5 ) 2 Mg), molybdenum hexacarbonyl (Mo(CO) 6 ) and praseodymium-β-diketone chelate (Pr(DPM) 3 ) in a molar ratio of 1:0.95:0.05, the carrier gas is argon, and the flow rate of the argon gas is 10 sccm. Oxygen is introduced, and the flow rate of oxygen gas is 120 sccm, and the deposition of the film is started. The thickness of the film is deposited to 150nm, turn off the organic source and carrier gas, ...

Embodiment 2

[0077] The substrate is ITO glass, which is ultrasonically cleaned with toluene, acetone and ethanol for 5 minutes, then rinsed with distilled water, air-dried with nitrogen, and sent to the reaction chamber of the equipment. Use a mechanical pump and a molecular pump to evacuate the vacuum of the chamber to 1.0×10 -3 Pa; Then the substrate is heat-treated at 700°C for 10 minutes, and then the temperature is lowered to 250°C. Turn on the rotary motor, adjust the rotating speed of the substrate holder to be 50 rpm, and feed the organic source cyclopentadiene magnesium ((C 5 h 5 ) 2 Mg), molybdenum hexacarbonyl (Mo(CO) 6 ) and praseodymium-β-diketone chelate (Pr(DPM) 3 ) in a molar ratio of 1:0.92:0.08, the carrier gas is argon, and the flow rate of the argon gas is 10 sccm. Oxygen is introduced, and the flow rate of oxygen gas is 10 sccm, and the deposition of the film is started. The thickness of the film is deposited to 80nm, close the organic source and carrier gas, co...

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Abstract

The invention relates to a praseodymium-doped molybdate light emitting film. The chemical formula of the praseodymium-doped molybdate light emitting film is MeMoO4:xPr<3+>, wherein x is greater than or equal to 0.01 and less than or equal to 0.08, Me is Mg, Ca, Sr or Ba, MeMoO4 is a matrix and praseodymium element is an active element. In an electroluminescence spectrum (EL) of the praseodymium-doped molybdate light emitting film, strong light emitting peaks are presented in the 611nm wavelength area and can be applied to a thin film electroluminescence display. The invention also provides a preparation method and application of the praseodymium-doped molybdate light emitting film.

Description

【Technical field】 [0001] The invention relates to a praseodymium-doped molybdate light-emitting thin film and a preparation method thereof, and a thin-film electroluminescent device and a preparation method thereof. 【Background technique】 [0002] Thin film electroluminescent display (TFELD) has attracted widespread attention and developed rapidly due to its advantages such as active light emission, full solid state, impact resistance, fast response, large viewing angle, wide application temperature, and simple process. At present, the research of color and even full-color TFELD and the development of multi-band luminescent films are the development direction of this subject. However, praseodymium-doped molybdate light-emitting films that can be applied to thin-film electroluminescent displays have not been reported yet. 【Content of invention】 [0003] Based on this, it is necessary to provide a praseodymium-doped molybdate light-emitting thin film applicable to thin-film...

Claims

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Application Information

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IPC IPC(8): C09K11/68H01L33/50H01L33/00
Inventor 周明杰王平陈吉星黄辉
Owner OCEANS KING LIGHTING SCI&TECH CO LTD
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