Manganese doped cerium antimonate light-emitting material, preparation method and application of material
A technology of luminescent materials and manganese doping, applied in luminescent materials, chemical instruments and methods, electrical components, etc.
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Embodiment 1
[0046] Select the powder with a purity of 99.99%, mix 1mmol of CeO 2 , 2.5mmol of Sb 2 o 5 ,0.03mmol of MnO 2 , after uniform mixing, sintering at 1250° C. for 3 hours to form a ceramic target with a diameter of 50 mm and a thickness of 2 mm, and the target was loaded into a vacuum chamber. Then, the glass substrate with indium tin oxide (ITO) was ultrasonically cleaned with acetone, absolute ethanol and deionized water successively, treated with oxygen plasma, and placed in a vacuum chamber. The distance between the target and the substrate is set to 60mm. Use a mechanical pump and a molecular pump to pump the vacuum of the cavity to 5.0×10 -4 Pa, the working gas flow rate of argon is 25 sccm, the pressure is adjusted to 2.0 Pa, and the substrate temperature is 500°C. The obtained samples were annealed in a 0.01 Pa vacuum furnace for 2 h at a temperature of 600 °C. Then a layer of Ag is vapor-deposited on the luminescent film as the cathode.
[0047] The general chemic...
Embodiment 2
[0050] Use powder with a purity of 99.99%, 1mmol of CeO 2 , 2.5mmol of Sb 2 o 5 ,0.08mmol of MnO 2 , after uniform mixing, sintering at 900°C to form a ceramic target with a diameter of 50mm and a thickness of 2mm, and put the target into a vacuum chamber. Then, the glass substrate with ITO was ultrasonically cleaned with acetone, absolute ethanol and deionized water successively, treated with oxygen plasma, and placed in a vacuum chamber. The distance between the target and the substrate was set to 45mm. Use a mechanical pump and a molecular pump to evacuate the vacuum of the chamber to 1.0×10 -3 Pa, the working gas flow rate of argon is 10 sccm, the pressure is adjusted to 0.2 Pa, and the substrate temperature is 250°C. The obtained samples were annealed in a 0.01 Pa vacuum furnace for 1 h at an annealing temperature of 500 °C. Then a layer of Ag is vapor-deposited on the luminescent film as the cathode.
[0051] The general chemical formula of the manganese-doped cer...
Embodiment 3
[0053] Use powder with a purity of 99.99%, 1mmol of CeO 2 , 2.5mmol of Sb 2 o 5 ,0.08mmol of MnO 2 , after being uniformly mixed, sintered at 1300°C to form a ceramic target with a diameter of 50mm and a thickness of 2mm, and put the target into a vacuum chamber. Then, the glass substrate with ITO was ultrasonically cleaned with acetone, absolute ethanol and deionized water successively, treated with oxygen plasma, and placed in a vacuum chamber. The distance between the target and the substrate is set to 95mm. Use a mechanical pump and a molecular pump to evacuate the vacuum of the chamber to 1.0×10 -5 Pa, the working gas flow rate of argon is 35 sccm, the pressure is adjusted to 4.0 Pa, and the substrate temperature is 750°C. The obtained samples were annealed in a 0.01Pa vacuum furnace for 3h at an annealing temperature of 800°C. Then a layer of Ag is vapor-deposited on the luminescent film as the cathode.
[0054] The general chemical formula of the manganese-doped ...
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